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@ -1,8 +1,8 @@
% This file was created with JabRef 2.5.
% Encoding: Cp1252
% Encoding: utf8
@ARTICLE{Abgr07,
author = {P. Abgrall and A.-M. Gué},
author = {P. Abgrall and A.-M. Gué},
title = {Lab-on-chip technologies: making a microfluidic network and coupling
it into a complete microsystem---a review},
journal = {J. Micromech. Microeng.},
@ -37,9 +37,9 @@
pages = {941\,-\,948},
doi = {10.1109/TPS.2005.845093},
file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
review = {Priorität 1
review = {Priorität 1
Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
url = {http://dx.doi.org/10.1109/TPS.2005.845093}
}
@ -126,8 +126,8 @@
}
@BOOK{Bohl1989,
title = {Technische Strömungslehre},
publisher = {Vogel-Verlag, Würzburg},
title = {Technische Strömungslehre},
publisher = {Vogel-Verlag, Würzburg},
year = {1989},
author = {Willi Bohl},
edition = {8th},
@ -374,7 +374,7 @@
@CONFERENCE{Eich05,
author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
bei niedrigen Temperaturen}},
booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
Berlin: VDE-Verlag, 2005, pp. 115-118},
@ -397,7 +397,7 @@
}
@ARTICLE{Klei03,
author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
Swollen Polymer Networks.},
journal = {Macromol. Chem. Phys.},
@ -407,7 +407,7 @@
}
@INPROCEEDINGS{Fahl01,
author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
title = {Deposition of multilayer optical coatings onto plastic webs by pulse
magnetron sputtering; challenges and opportunities},
booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
@ -484,7 +484,7 @@
author = {M. Gerbracht},
title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
Trocknungsverfahren}},
school = {Fachhochschule Düsseldorf},
school = {Fachhochschule Düsseldorf},
year = {2003},
type = {Diplomarbeit},
file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
@ -509,7 +509,7 @@
volume = {36},
pages = {39\,-\,49},
doi = {10.1088/0022-3727/36/1/306},
file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
}
@ -517,7 +517,7 @@
author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
title = {The role of emission from the dielectric surface in a homogeneous
barrier discharge in nitrogen},
booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
July 2001) vol VIII p 3239-3244},
year = {2001},
file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
@ -538,7 +538,7 @@
booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
Vol. 1, p. 233-234},
year = {2002},
file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
}
@ -630,7 +630,7 @@
}
@ARTICLE{Heul04,
author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
title = {Patterning colloidal suspensions by selective wetting of microcontact-printed
surfaces},
journal = {J. Eur. Ceram. Soc.},
@ -643,7 +643,7 @@
}
@ARTICLE{Heusch1998,
author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
Renaud},
title = {Buried microchannels in photopolymer for delivering of solutions
to neurons in a network},
@ -852,7 +852,7 @@
}
@ARTICLE{Klag00,
author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
title = {Surface functionalization at atmospheric pressure by {DBD}-based
pulsed plasma polymerization},
journal = {Plasmas and Polymers},
@ -1051,7 +1051,7 @@
}
@ARTICLE{Luca08-2,
author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
title = {Microplasma stamps for selective surface modification: design and
characterization},
journal = {J. Phys. D: Appl. Phys.},
@ -1064,7 +1064,7 @@
}
@ARTICLE{Luca08-1,
author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
title = {Design and optimization of dielectric barrier discharge microplasma
stamps},
journal = {J. Phys. D: Appl. Phys.},
@ -1182,7 +1182,7 @@
}
@CONFERENCE{Menz02,
author = {W. Menz and R. Förster and A. Schoth and C. Müller},
author = {W. Menz and R. Förster and A. Schoth and C. Müller},
title = {Non-conventional machining for microsystems},
booktitle = {Proc. 3rd Euspen Int. Conf.},
year = {2002},
@ -1190,7 +1190,7 @@
}
@ARTICLE{Mira00,
author = {S.F. Miralaï and others},
author = {S.F. Miralaï and others},
title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges
{(DBD) in He and N2} for Polymer Treatment},
journal = {Plasmas and Polymers},
@ -1257,7 +1257,7 @@
}
@ARTICLE{Muel1999,
author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
Boeuf},
title = {Self-Organized Filaments in Dielectric Barrier Glow Discharges},
journal = {IEEE Trans. Plasma Sci.},
@ -1265,14 +1265,14 @@
volume = {27},
pages = {20\,-\,21},
doi = {10.1109/27.763004},
file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
url = {http://dx.doi.org/10.1109/27.763004}
}
@ARTICLE{Naka01,
author = {A. Nakajima and K. Hashimoto and T. Watanabe},
title = {Recent studies on super-hydrophobic films},
journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
year = {2001},
volume = {132},
pages = {31\,-\,41},
@ -1312,7 +1312,7 @@
author = {L. Nordheim},
title = {Zur Theorie der thermischen Emission und der Reflexion von Elektronen
an Metallen},
journal = {Zeitschrift für Physik A Hadrons and Nuclei},
journal = {Zeitschrift für Physik A Hadrons and Nuclei},
year = {1928},
volume = {46},
pages = {833\,-\,855},
@ -1324,14 +1324,14 @@
}
@CONFERENCE{Nuss09,
author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
title = {Micromixing Structures for Lab-on Chip Applications: Fabrication
and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
booktitle = {4M\,/\,ICOMM 2009 Conference},
year = {2009},
pages = {215\,-\,218},
doi = {10.1243/17547164C0012009041},
file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
owner = {usti},
url = {http://dx.doi.org/10.1243/17547164C0012009041}
}
@ -1349,7 +1349,7 @@
}
@ARTICLE{Ohl1999,
author = {A. Ohl and K. Schröder},
author = {A. Ohl and K. Schröder},
title = {Plasma-induced chemical micropatterning for cell culturing applications:
a brief review},
journal = {Surf. Coat. Technol.},
@ -1413,7 +1413,7 @@
@ARTICLE{Pasc1889,
author = {F. Paschen},
title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
bei verschiedenen Drucken erforderliche Potentialdifferenz}},
journal = {Annalen der Physik},
year = {1889},
@ -1610,7 +1610,7 @@
}
@ARTICLE{Scho1999,
author = {U.P Schönholzer and L.J. Gauckler},
author = {U.P Schönholzer and L.J. Gauckler},
title = {Ceramic parts patterned in the micrometer range},
journal = {Adv. Mater.},
year = {1999},
@ -1692,7 +1692,7 @@
}
@ARTICLE{Stoe10,
author = {U. Stöhr and others},
author = {U. Stöhr and others},
title = {Porous photoresist stamps for selective plasma treatment},
journal = {Plasma Processes Polym.},
year = {2010},
@ -1700,12 +1700,12 @@
pages = {9\,-\,15},
number = {1},
doi = {10.1002/ppap.200900063},
file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
url = {\newline http://dx.doi.org/10.1002/ppap.200900063}
}
@ARTICLE{Stoe09,
author = {Uwe Stöhr and others},
author = {Uwe Stöhr and others},
title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer
Scales},
journal = {Plasma Process. Polym.},
@ -1719,7 +1719,7 @@
}
@ARTICLE{Stoe08,
author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
title = {High-resolution permanent photoresist laminate for microsystem applications},
journal = {J. Micro/Nanolith. MEMS MOEMS},
year = {2008},