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% This file was created with JabRef 2.5.
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% Encoding: Cp1252
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% Encoding: utf8
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@ARTICLE{Abgr07,
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author = {P. Abgrall and A.-M. Gué},
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author = {P. Abgrall and A.-M. Gué},
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title = {Lab-on-chip technologies: making a microfluidic network and coupling
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it into a complete microsystem---a review},
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journal = {J. Micromech. Microeng.},
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@ -37,9 +37,9 @@
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pages = {941\,-\,948},
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doi = {10.1109/TPS.2005.845093},
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file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
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review = {Priorität 1
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review = {Priorität 1
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Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
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Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
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url = {http://dx.doi.org/10.1109/TPS.2005.845093}
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}
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@ -126,8 +126,8 @@
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}
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@BOOK{Bohl1989,
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title = {Technische Strömungslehre},
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publisher = {Vogel-Verlag, Würzburg},
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title = {Technische Strömungslehre},
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publisher = {Vogel-Verlag, Würzburg},
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year = {1989},
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author = {Willi Bohl},
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edition = {8th},
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@ -374,7 +374,7 @@
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@CONFERENCE{Eich05,
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author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
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title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
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title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
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bei niedrigen Temperaturen}},
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booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
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Berlin: VDE-Verlag, 2005, pp. 115-118},
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@ -397,7 +397,7 @@
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}
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@ARTICLE{Klei03,
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author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
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author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
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title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
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Swollen Polymer Networks.},
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journal = {Macromol. Chem. Phys.},
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@ -407,7 +407,7 @@
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}
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@INPROCEEDINGS{Fahl01,
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author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
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author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
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title = {Deposition of multilayer optical coatings onto plastic webs by pulse
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magnetron sputtering; challenges and opportunities},
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booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
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@ -484,7 +484,7 @@
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author = {M. Gerbracht},
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title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
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Trocknungsverfahren}},
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school = {Fachhochschule Düsseldorf},
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school = {Fachhochschule Düsseldorf},
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year = {2003},
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type = {Diplomarbeit},
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file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
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@ -509,7 +509,7 @@
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volume = {36},
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pages = {39\,-\,49},
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doi = {10.1088/0022-3727/36/1/306},
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file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
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file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
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url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
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}
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@ -517,7 +517,7 @@
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author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
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title = {The role of emission from the dielectric surface in a homogeneous
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barrier discharge in nitrogen},
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booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
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booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
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July 2001) vol VIII p 3239-3244},
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year = {2001},
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file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
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@ -538,7 +538,7 @@
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booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
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Vol. 1, p. 233-234},
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year = {2002},
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file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
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file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
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url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
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}
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@ -630,7 +630,7 @@
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}
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@ARTICLE{Heul04,
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author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
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author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
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title = {Patterning colloidal suspensions by selective wetting of microcontact-printed
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surfaces},
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journal = {J. Eur. Ceram. Soc.},
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@ -643,7 +643,7 @@
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}
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@ARTICLE{Heusch1998,
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author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
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author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
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Renaud},
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title = {Buried microchannels in photopolymer for delivering of solutions
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to neurons in a network},
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@ -852,7 +852,7 @@
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}
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@ARTICLE{Klag00,
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author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
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author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
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title = {Surface functionalization at atmospheric pressure by {DBD}-based
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pulsed plasma polymerization},
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journal = {Plasmas and Polymers},
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@ -1051,7 +1051,7 @@
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}
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@ARTICLE{Luca08-2,
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author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
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author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
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title = {Microplasma stamps for selective surface modification: design and
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characterization},
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journal = {J. Phys. D: Appl. Phys.},
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@ -1064,7 +1064,7 @@
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}
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@ARTICLE{Luca08-1,
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author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
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author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
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title = {Design and optimization of dielectric barrier discharge microplasma
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stamps},
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journal = {J. Phys. D: Appl. Phys.},
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@ -1182,7 +1182,7 @@
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}
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@CONFERENCE{Menz02,
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author = {W. Menz and R. Förster and A. Schoth and C. Müller},
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author = {W. Menz and R. Förster and A. Schoth and C. Müller},
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title = {Non-conventional machining for microsystems},
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booktitle = {Proc. 3rd Euspen Int. Conf.},
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year = {2002},
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@ -1190,7 +1190,7 @@
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}
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@ARTICLE{Mira00,
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author = {S.F. Miralaï and others},
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author = {S.F. Miralaï and others},
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title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges
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{(DBD) in He and N2} for Polymer Treatment},
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journal = {Plasmas and Polymers},
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@ -1257,7 +1257,7 @@
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}
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@ARTICLE{Muel1999,
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author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
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author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
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Boeuf},
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title = {Self-Organized Filaments in Dielectric Barrier Glow Discharges},
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journal = {IEEE Trans. Plasma Sci.},
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@ -1265,14 +1265,14 @@
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volume = {27},
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pages = {20\,-\,21},
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doi = {10.1109/27.763004},
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file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
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file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
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url = {http://dx.doi.org/10.1109/27.763004}
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}
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@ARTICLE{Naka01,
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author = {A. Nakajima and K. Hashimoto and T. Watanabe},
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title = {Recent studies on super-hydrophobic films},
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journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
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journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
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year = {2001},
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volume = {132},
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pages = {31\,-\,41},
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@ -1312,7 +1312,7 @@
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author = {L. Nordheim},
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title = {Zur Theorie der thermischen Emission und der Reflexion von Elektronen
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an Metallen},
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journal = {Zeitschrift für Physik A Hadrons and Nuclei},
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journal = {Zeitschrift für Physik A Hadrons and Nuclei},
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year = {1928},
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volume = {46},
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pages = {833\,-\,855},
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@ -1324,14 +1324,14 @@
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}
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@CONFERENCE{Nuss09,
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author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
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author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
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title = {Micromixing Structures for Lab-on Chip Applications: Fabrication
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and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
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and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
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booktitle = {4M\,/\,ICOMM 2009 Conference},
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year = {2009},
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pages = {215\,-\,218},
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doi = {10.1243/17547164C0012009041},
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file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
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file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
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owner = {usti},
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url = {http://dx.doi.org/10.1243/17547164C0012009041}
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}
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@ -1349,7 +1349,7 @@
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}
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@ARTICLE{Ohl1999,
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author = {A. Ohl and K. Schröder},
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author = {A. Ohl and K. Schröder},
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title = {Plasma-induced chemical micropatterning for cell culturing applications:
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a brief review},
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journal = {Surf. Coat. Technol.},
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@ -1413,7 +1413,7 @@
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@ARTICLE{Pasc1889,
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author = {F. Paschen},
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title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
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title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
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bei verschiedenen Drucken erforderliche Potentialdifferenz}},
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journal = {Annalen der Physik},
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year = {1889},
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@ -1610,7 +1610,7 @@
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}
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@ARTICLE{Scho1999,
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author = {U.P Schönholzer and L.J. Gauckler},
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author = {U.P Schönholzer and L.J. Gauckler},
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title = {Ceramic parts patterned in the micrometer range},
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journal = {Adv. Mater.},
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year = {1999},
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@ -1692,7 +1692,7 @@
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}
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@ARTICLE{Stoe10,
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author = {U. Stöhr and others},
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author = {U. Stöhr and others},
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title = {Porous photoresist stamps for selective plasma treatment},
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journal = {Plasma Processes Polym.},
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year = {2010},
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@ -1700,12 +1700,12 @@
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pages = {9\,-\,15},
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number = {1},
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doi = {10.1002/ppap.200900063},
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file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
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file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
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url = {\newline http://dx.doi.org/10.1002/ppap.200900063}
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}
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@ARTICLE{Stoe09,
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author = {Uwe Stöhr and others},
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author = {Uwe Stöhr and others},
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title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer
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Scales},
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journal = {Plasma Process. Polym.},
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@ -1719,7 +1719,7 @@
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}
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@ARTICLE{Stoe08,
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author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
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author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
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title = {High-resolution permanent photoresist laminate for microsystem applications},
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journal = {J. Micro/Nanolith. MEMS MOEMS},
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year = {2008},
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