mirror of
https://git.lyx.org/repos/lyx.git
synced 2024-11-30 05:12:40 +00:00
f5cf21d725
When a user creates a new document from a template, the template is copied but relative paths are not changed, so the resulting .lyx file is broken. By moving documents with relative paths to examples, the files will compile out of the box. A long-term solution that allows for relative paths in templates is still desired and will be discussed in #8643 or in a new ticket.
2127 lines
70 KiB
BibTeX
2127 lines
70 KiB
BibTeX
% This file was created with JabRef 2.5.
|
|
% Encoding: Cp1252
|
|
|
|
@ARTICLE{Abgr07,
|
|
author = {P. Abgrall and A.-M. Gué},
|
|
title = {Lab-on-chip technologies: making a microfluidic network and coupling
|
|
it into a complete microsystem---a review},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2007},
|
|
volume = {17},
|
|
pages = {R15\,-\,R49},
|
|
doi = {10.1088/0960-1317/17/5/R01},
|
|
file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01}
|
|
}
|
|
|
|
@ARTICLE{Abgr06,
|
|
author = {P. Abgrall and others},
|
|
title = {A novel fabrication method of flexible and monolithic {3D microfluidic
|
|
structures using lamination of SU-8} films},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2006},
|
|
volume = {16},
|
|
pages = {113\,-\,121},
|
|
doi = {10.1088/0960-1317/16/1/016},
|
|
file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/16/1/016}
|
|
}
|
|
|
|
@ARTICLE{Abol05,
|
|
author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana},
|
|
title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure:
|
|
Edge Effect},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {2005},
|
|
volume = {33},
|
|
pages = {941\,-\,948},
|
|
doi = {10.1109/TPS.2005.845093},
|
|
file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
|
|
review = {Priorität 1
|
|
|
|
Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
|
|
url = {http://dx.doi.org/10.1109/TPS.2005.845093}
|
|
}
|
|
|
|
@ARTICLE{Akis03,
|
|
author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik
|
|
and A.E. Monich and N.I. Trushkin},
|
|
title = {Comparison of the AC Barrier Corona with DC Positive and Negative
|
|
Coronas and Barrier Discharge},
|
|
journal = {Plasma Physics Reports},
|
|
year = {2003},
|
|
volume = {29},
|
|
pages = {90\,-\,100},
|
|
doi = {10.1134/1.1538505},
|
|
file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF},
|
|
url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf}
|
|
}
|
|
|
|
@ARTICLE{Baba01,
|
|
author = {S.E. Babayan and others},
|
|
title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure
|
|
plasma jet},
|
|
journal = {Plasma Sources Sci. Technol.},
|
|
year = {2001},
|
|
volume = {10},
|
|
pages = {573\,-\,578},
|
|
number = {4},
|
|
doi = {10.1088/0963-0252/10/4/305},
|
|
file = {:DBD\\Babayan-SiOx-2001.pdf:PDF},
|
|
publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
|
|
c1991-},
|
|
url = {http://dx.doi.org/10.1088/0963-0252/10/4/305}
|
|
}
|
|
|
|
@ARTICLE{Beck06,
|
|
author = {K.H. Becker and K.H. Schoenbach and J.G. Eden},
|
|
title = {Microplasmas and applications},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2006},
|
|
volume = {39},
|
|
pages = {R55\,-\,R70},
|
|
doi = {10.1088/0022-3727/39/3/R01},
|
|
file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01}
|
|
}
|
|
|
|
@ARTICLE{Bile04,
|
|
author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen},
|
|
title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with
|
|
integrated optics},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2004},
|
|
volume = {14},
|
|
pages = {814\,-\,818},
|
|
doi = {10.1088/0960-1317/14/6/008},
|
|
file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/14/6/008}
|
|
}
|
|
|
|
@ARTICLE{Blan04,
|
|
author = {F. J. Blanco and others},
|
|
title = {Novel three-dimensional embedded {SU-8} microchannels fabricated
|
|
using a low temperature full wafer adhesive bonding},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2004},
|
|
volume = {14},
|
|
pages = {1047\,-\,1056},
|
|
doi = {10.1088/0960-1317/14/7/027},
|
|
file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/14/7/027}
|
|
}
|
|
|
|
@ARTICLE{Boga02,
|
|
author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen},
|
|
title = {Gas discharge plasmas and their applications},
|
|
journal = {Spectrochim. Acta. B Atom. Spectros.},
|
|
year = {2002},
|
|
volume = {57},
|
|
pages = {609--658},
|
|
number = {4},
|
|
doi = {10.1016/S0584-8547(01)00406-2},
|
|
file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF},
|
|
publisher = {Elsevier},
|
|
url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}}
|
|
}
|
|
|
|
@BOOK{Bohl1989,
|
|
title = {Technische Strömungslehre},
|
|
publisher = {Vogel-Verlag, Würzburg},
|
|
year = {1989},
|
|
author = {Willi Bohl},
|
|
edition = {8th},
|
|
url = {http://www.worldcat.org/oclc/315749265}
|
|
}
|
|
|
|
@ARTICLE{Bran07,
|
|
author = {R. Brandenburg and others},
|
|
title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric
|
|
Pressure {Rf}-Driven Plasma Jet},
|
|
journal = {Contrib. Plasma Phys.},
|
|
year = {2007},
|
|
volume = {47},
|
|
pages = {72\,-\,79},
|
|
doi = {10.1002/ctpp.200710011},
|
|
file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1002/ctpp.200710011}
|
|
}
|
|
|
|
@ARTICLE{Bran05,
|
|
author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov},
|
|
title = {Axial and radial development of microdischarges of barrier discharges
|
|
in {N2/O2} mixtures at atmospheric pressure},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2005},
|
|
volume = {38},
|
|
pages = {1649\,-\,1657},
|
|
number = {11},
|
|
doi = {10.1088/0022-3727/38/11/003},
|
|
file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF},
|
|
publisher = {London: The Institute of Physics and The Physical Society.},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/38/11/003}
|
|
}
|
|
|
|
@CONFERENCE{Brea09,
|
|
author = {M.C. Breadmore and E. Candish and R.M. Guijt},
|
|
title = {Dry film photoresist, saving time and money without compromising
|
|
on performance},
|
|
booktitle = {\textmu TAS 2009},
|
|
year = {2009}
|
|
}
|
|
|
|
@BOOK{Bruu08,
|
|
title = {Theoretical Microfluidics},
|
|
publisher = {Oxford University Press},
|
|
year = {2008},
|
|
author = {Henrik Bruus},
|
|
url = {http://www.worldcat.org/oclc/176807166}
|
|
}
|
|
|
|
@ARTICLE{Bull01,
|
|
author = {N.A. Bullett and others},
|
|
title = {Direct imaging of plasma-polymerized chemical micropatterns},
|
|
journal = {Surf. Interface Anal.},
|
|
year = {2001},
|
|
volume = {31},
|
|
pages = {1074\,-\,1076},
|
|
number = {11},
|
|
doi = {10.1002/sia.1146},
|
|
file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1002/sia.1146}
|
|
}
|
|
|
|
@ARTICLE{Carl04,
|
|
author = {J. Carlier and others},
|
|
title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry
|
|
analysis},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2004},
|
|
volume = {14},
|
|
pages = {619\,-\,624},
|
|
doi = {10.1088/0960-1317/14/4/024},
|
|
file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/14/4/024}
|
|
}
|
|
|
|
@ARTICLE{Carl1977,
|
|
author = {Carlsson, DJ and Garton, A. and Wiles, DM},
|
|
title = {The weatherability of polypropylene monofilaments. Effects of fiber
|
|
production conditions},
|
|
journal = {Journal of Applied Polymer Science},
|
|
year = {1977},
|
|
volume = {21},
|
|
pages = {2963\,-\,2978},
|
|
number = {11},
|
|
doi = {10.1002/app.1977.070211112},
|
|
file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF},
|
|
publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
|
|
url = {http://dx.doi.org/10.1002/app.1977.070211112}
|
|
}
|
|
|
|
@ARTICLE{Carr1903,
|
|
author = {W.R. Carr},
|
|
title = {On the Laws Governing Electric Discharges in Gases at Low Pressures},
|
|
journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.},
|
|
year = {1903},
|
|
volume = {201},
|
|
pages = {403-433},
|
|
doi = {10.1098/rsta.1903.0020},
|
|
file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1098/rsta.1903.0020}
|
|
}
|
|
|
|
@ARTICLE{Chang00,
|
|
author = {H.-K. Chang and Y.-K. Kim},
|
|
title = {{UV-LIGA process for high aspect ratio structure using stress barrier
|
|
and C-shaped etch hole}},
|
|
journal = {Sensors and Actuators A},
|
|
year = {2000},
|
|
volume = {84},
|
|
pages = {342\,-\,350},
|
|
doi = {10.1016/S0924-4247(00)00408-8},
|
|
file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF},
|
|
url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}}
|
|
}
|
|
|
|
@ARTICLE{Char1967,
|
|
author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson},
|
|
title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I.
|
|
Theory},
|
|
journal = {J. Appl. Phys.},
|
|
year = {1967},
|
|
volume = {38},
|
|
pages = {627\,-\,633},
|
|
doi = {10.1063/1.1709385},
|
|
file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF},
|
|
publisher = {AIP},
|
|
url = {http://dx.doi.org/10.1063/1.1709385}
|
|
}
|
|
|
|
@ARTICLE{Char1967-2,
|
|
author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson},
|
|
title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II.
|
|
Experimental},
|
|
journal = {J. Appl. Phys.},
|
|
year = {1967},
|
|
volume = {38},
|
|
pages = {634\,-\,640},
|
|
doi = {10.1063/1.1709386},
|
|
file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF},
|
|
publisher = {AIP},
|
|
url = {http://dx.doi.org/10.1063/1.1709386}
|
|
}
|
|
|
|
@ARTICLE{Coog1996,
|
|
author = {J.J. Coogan and A.D. Sappey},
|
|
title = {Distribution of {OH} within silent discharge plasma reactors},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {1996},
|
|
volume = {24},
|
|
pages = {91\,-\,92},
|
|
number = {1},
|
|
doi = {10.1109/27.491706},
|
|
file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/27.491706}
|
|
}
|
|
|
|
@ARTICLE{Cutl1993,
|
|
author = {P. Cutler},
|
|
title = {Theory of electron emission in high fields from atomically sharp
|
|
emitters: Validity of the Fowler-Nordheim equation},
|
|
journal = {Progress in Surface Science},
|
|
year = {1993},
|
|
volume = {42},
|
|
pages = {169\,-\,185},
|
|
number = {1-4},
|
|
doi = {10.1016/0079-6816(93)90068-7},
|
|
file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF},
|
|
url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}}
|
|
}
|
|
|
|
@BOOK{Davi1998,
|
|
title = {Metals handbook: desk edition},
|
|
publisher = {ASM International},
|
|
year = {1998},
|
|
author = {J.R. Davis},
|
|
pages = {1128},
|
|
edition = {2nd}
|
|
}
|
|
|
|
@ARTICLE{Dikm04,
|
|
author = {A.J. Dikmans and others},
|
|
title = {A new compact disc format of high density array synthesis applied
|
|
to peptide nucleic acids and in situ {MALDI} analysis},
|
|
journal = {Molecular diversity},
|
|
year = {2004},
|
|
volume = {8},
|
|
pages = {197\,-\,207},
|
|
number = {3},
|
|
doi = {10.1023/B:MODI.0000036234.66238.4e},
|
|
file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e}
|
|
}
|
|
|
|
@PHDTHESIS{Dora02,
|
|
author = {Rajesh Dorai},
|
|
title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces},
|
|
school = {University of Illinois at Urbana-Champaign},
|
|
year = {2002},
|
|
file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF},
|
|
url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf}
|
|
}
|
|
|
|
@ARTICLE{Dora03,
|
|
author = {R. Dorai and M.J. Kushner},
|
|
title = {A model for plasma modification of polypropylene using atmospheric
|
|
pressure discharges},
|
|
journal = {J. Phys. D: Appl. Phys},
|
|
year = {2003},
|
|
volume = {36},
|
|
pages = {666\,-\,685},
|
|
number = {6},
|
|
doi = {10.1088/0022-3727/36/6/309},
|
|
file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF},
|
|
publisher = {IOP PUBLISHING LTD},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/36/6/309}
|
|
}
|
|
|
|
@ARTICLE{Dush1923,
|
|
author = {S. Dushman},
|
|
title = {Electron Emission from Metals as a Function of Temperature},
|
|
journal = {Physical Review},
|
|
year = {1923},
|
|
volume = {21},
|
|
pages = {623\,-\,636},
|
|
doi = {10.1103/PhysRev.21.623},
|
|
file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF},
|
|
publisher = {APS},
|
|
url = {http://dx.doi.org/10.1103/PhysRev.21.623}
|
|
}
|
|
|
|
@ARTICLE{Eden03,
|
|
author = {J.G. Eden and others},
|
|
title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer
|
|
structures: arrays, emitters and photodetectors},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2003},
|
|
volume = {36},
|
|
pages = {2869\,-\,2877},
|
|
doi = {10.1088/0022-3727/36/23/001},
|
|
file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/36/23/001}
|
|
}
|
|
|
|
@CONFERENCE{Eich05,
|
|
author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
|
|
title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
|
|
bei niedrigen Temperaturen}},
|
|
booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
|
|
Berlin: VDE-Verlag, 2005, pp. 115-118},
|
|
year = {2005},
|
|
file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF},
|
|
url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926}
|
|
}
|
|
|
|
@ARTICLE{Elia1991,
|
|
author = {B. Eliasson and U. Kogelschatz},
|
|
title = {Modeling and applications of silent discharge plasmas},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {1991},
|
|
volume = {19},
|
|
pages = {309\,-\,323},
|
|
number = {2},
|
|
doi = {10.1109/27.106829},
|
|
file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/27.106829}
|
|
}
|
|
|
|
@ARTICLE{Klei03,
|
|
author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
|
|
title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
|
|
Swollen Polymer Networks.},
|
|
journal = {Macromol. Chem. Phys.},
|
|
year = {2003},
|
|
volume = {204},
|
|
pages = {F24\,-\,F25}
|
|
}
|
|
|
|
@INPROCEEDINGS{Fahl01,
|
|
author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
|
|
title = {Deposition of multilayer optical coatings onto plastic webs by pulse
|
|
magnetron sputtering; challenges and opportunities},
|
|
booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
|
|
Processes (ISSP), p. 189, Kanazawa, Japan},
|
|
year = {2001},
|
|
file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF}
|
|
}
|
|
|
|
@CONFERENCE{Flac02,
|
|
author = {W.W. Flack and H.A. Nguyen and E. Capsuto},
|
|
title = {Characterization of a novel photoresist redistribution material for
|
|
advanced packaging applications},
|
|
booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference
|
|
Series},
|
|
year = {2002},
|
|
volume = {4690},
|
|
pages = {1203\,-\,1216},
|
|
doi = {10.1117/12.474198},
|
|
file = {:Photolacke\\SINR-resist-2002.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1117/12.474198}
|
|
}
|
|
|
|
@ARTICLE{Forb1999,
|
|
author = {R.G. Forbes},
|
|
title = {Refining the application of Fowler-Nordheim theory},
|
|
journal = {Ultramicroscopy},
|
|
year = {1999},
|
|
volume = {79},
|
|
pages = {11\,-\,23},
|
|
doi = {10.1016/S0304-3991(99)00097-2},
|
|
file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2}
|
|
}
|
|
|
|
@ARTICLE{Fowl1928,
|
|
author = {R.H. Fowler and L. Nordheim},
|
|
title = {Electron Emission in Intense Electric Fields},
|
|
journal = {Proceedings of the Royal Society of London. Series A, Containing
|
|
Papers of a Mathematical and Physical Character},
|
|
year = {1928},
|
|
volume = {119},
|
|
pages = {173\,-\,181},
|
|
number = {781},
|
|
month = {May},
|
|
file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF},
|
|
url = {http://www.jstor.org/pss/95023}
|
|
}
|
|
|
|
@ARTICLE{Gabo1993,
|
|
author = {S.R. Gaboury and M.W. Urban},
|
|
title = {Microwave plasma reactions of solid monomers with silicone elastomer
|
|
surfaces: a spectroscopic study},
|
|
journal = {Langmuir},
|
|
year = {1993},
|
|
volume = {9},
|
|
pages = {3225\,-\,3233},
|
|
number = {11},
|
|
doi = {10.1021/la00035a076},
|
|
file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF},
|
|
publisher = {American Chemical Society},
|
|
url = {http://dx.doi.org/10.1021/la00035a076}
|
|
}
|
|
|
|
@MISC{GEKA,
|
|
author = {{GEKA~mbH}},
|
|
title = {Destroying chemical warfare agents and contaminated military waste},
|
|
howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html
|
|
(accessed 06-09-2009)},
|
|
owner = {usti},
|
|
url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html}
|
|
}
|
|
|
|
@MASTERSTHESIS{Gerb03,
|
|
author = {M. Gerbracht},
|
|
title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
|
|
Trocknungsverfahren}},
|
|
school = {Fachhochschule Düsseldorf},
|
|
year = {2003},
|
|
type = {Diplomarbeit},
|
|
file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
|
|
}
|
|
|
|
@INPROCEEDINGS{Golub02-2,
|
|
author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke},
|
|
title = {Stability of the barrier discharge relative to the filamentation},
|
|
booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
|
|
Vol. 1, p. 235-236},
|
|
year = {2002},
|
|
file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF},
|
|
url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf}
|
|
}
|
|
|
|
@ARTICLE{Golub03,
|
|
author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
|
|
title = {Modelling of the homogeneous barrier discharge in helium at atmospheric
|
|
pressure},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2003},
|
|
volume = {36},
|
|
pages = {39\,-\,49},
|
|
doi = {10.1088/0022-3727/36/1/306},
|
|
file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
|
|
}
|
|
|
|
@INPROCEEDINGS{Golub01,
|
|
author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
|
|
title = {The role of emission from the dielectric surface in a homogeneous
|
|
barrier discharge in nitrogen},
|
|
booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
|
|
July 2001) vol VIII p 3239-3244},
|
|
year = {2001},
|
|
file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
|
|
url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf}
|
|
}
|
|
|
|
@MISC{Filament,
|
|
author = {Yu. B. Golubovskii},
|
|
howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg
|
|
(accessed 07-09-2009)},
|
|
owner = {usti},
|
|
url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg}
|
|
}
|
|
|
|
@INPROCEEDINGS{Golub02,
|
|
author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke},
|
|
title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen},
|
|
booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
|
|
Vol. 1, p. 233-234},
|
|
year = {2002},
|
|
file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
|
|
url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
|
|
}
|
|
|
|
@MISC{GolubWeb,
|
|
author = {Yu. B. Golubovskii and others},
|
|
title = {Homogeneous barrier discharge},
|
|
howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html},
|
|
url = {http://optics.phys.spbu.ru/~golub/english/barrier.html}
|
|
}
|
|
|
|
@ARTICLE{Goos1998,
|
|
author = {A. Goossens and E.L. Maloney and J Schoonman},
|
|
title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$},
|
|
journal = {Chemical Vapor Deposition},
|
|
year = {1998},
|
|
volume = {4},
|
|
pages = {109\,-\,114},
|
|
number = {3},
|
|
doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U},
|
|
file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF},
|
|
publisher = {WILEY-VCH Verlag GmbH Weinheim},
|
|
url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}}
|
|
}
|
|
|
|
@ARTICLE{Graz08,
|
|
author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. Gruber},
|
|
title = {Micropatterned atmospheric pressure discharge surface modification
|
|
of fluorinated polymer films for mammalian cell adhesion and protein
|
|
binding},
|
|
journal = {Appl. Phys. A},
|
|
year = {2008},
|
|
volume = {92},
|
|
pages = {547\,-\,555},
|
|
doi = {10.1007/s00339-008-4614-z},
|
|
file = {:DBD\\Graz-Patterned surface treatment-2008.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1007/s00339-008-4614-z}
|
|
}
|
|
|
|
@ARTICLE{Han04,
|
|
author = {M. Han and W. Lee and S.-K. Lee and S.S. Lee},
|
|
title = {{3D microfabrication with inclined/rotated UV lithography}},
|
|
journal = {Sensors and Actuators A},
|
|
year = {2003},
|
|
volume = {111},
|
|
pages = {14\,-\,20},
|
|
doi = {10.1016/j.sna.2003.10.006},
|
|
file = {Rotated UV.pdf:Photolacke\\Rotated UV.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1016/j.sna.2003.10.006}
|
|
}
|
|
|
|
@ARTICLE{Hand00,
|
|
author = {K. Handique and D.T. Burke and C.H. Mastrangelo and M.A. Burns},
|
|
title = {{Nanoliter liquid metering in microchannels using hydrophobic patterns}},
|
|
journal = {Anal. Chem.},
|
|
year = {2000},
|
|
volume = {72},
|
|
pages = {4100\,-\,4109},
|
|
number = {17},
|
|
doi = {10.1021/ac000064s},
|
|
file = {:Allgemein\\Handique-hydrophobic-channels-2000.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1021/ac000064s}
|
|
}
|
|
|
|
@ARTICLE{Hei04,
|
|
author = {M. Heise and W. Neff and O. Franken and P. Muranyi and J. Wunderlich},
|
|
title = {Sterilization of Polymer Foils with Dielectric Barrier Discharges
|
|
at Atmospheric Pressure},
|
|
journal = {Plasmas polym.},
|
|
year = {2004},
|
|
volume = {9},
|
|
pages = {23\,-\,33},
|
|
doi = {10.1023/B:PAPO.0000039814.70172.c0},
|
|
file = {DBD_Sterilisation_Heise2004.pdf:DBD\\DBD_Sterilisation_Heise2004.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1023/B:PAPO.0000039814.70172.c0}
|
|
}
|
|
|
|
@ARTICLE{Hens07,
|
|
author = {K. Hensel and others},
|
|
title = {Electrical and Optical Properties of {AC} Microdischarges in Porous
|
|
Ceramics},
|
|
journal = {Plasma Process. Polym.},
|
|
year = {2007},
|
|
volume = {4},
|
|
pages = {682\,-\,693},
|
|
doi = {10.1002/ppap.200700022},
|
|
file = {:DBD\\Hensel-DBD-in-Ceramics-2007.pdf:PDF},
|
|
publisher = {WILEY-VCH Verlag Weinheim},
|
|
url = {http://dx.doi.org/10.1002/ppap.200700022}
|
|
}
|
|
|
|
@ARTICLE{Heul04,
|
|
author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
|
|
title = {Patterning colloidal suspensions by selective wetting of microcontact-printed
|
|
surfaces},
|
|
journal = {J. Eur. Ceram. Soc.},
|
|
year = {2003},
|
|
volume = {24},
|
|
pages = {2733\,-\,2739},
|
|
doi = {10.1016/j.jeurceramsoc.2003.09.011},
|
|
file = {:DBD\\Heule2004.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1016/j.jeurceramsoc.2003.09.011}
|
|
}
|
|
|
|
@ARTICLE{Heusch1998,
|
|
author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
|
|
Renaud},
|
|
title = {Buried microchannels in photopolymer for delivering of solutions
|
|
to neurons in a network},
|
|
journal = {Sensors and Actuators B},
|
|
year = {1998},
|
|
volume = {48},
|
|
pages = {356\,-\,361},
|
|
doi = {10.1016/S0925-4005(98)00071-9},
|
|
file = {buried microchannels in photopolymer.pdf:Photolacke\\buried microchannels in photopolymer.pdf:PDF},
|
|
url = {\href{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}}
|
|
}
|
|
|
|
@ARTICLE{Ho04,
|
|
author = {K.H. Ho and S.T. Newman and S. Rahimifard and R.D. Allen},
|
|
title = {State of the art in wire electrical discharge machining {(WEDM)}},
|
|
journal = {Int. J. Mach. Tool. Manufact.},
|
|
year = {2004},
|
|
volume = {44},
|
|
pages = {1247\,-\,1259},
|
|
number = {12\,-\,13},
|
|
doi = {10.1016/j.ijmachtools.2004.04.017},
|
|
publisher = {Elsevier},
|
|
url = {http://dx.doi.org/10.1016/j.ijmachtools.2004.04.017}
|
|
}
|
|
|
|
@ARTICLE{Inag1998,
|
|
author = {N. Inagaki and S. Tasaka and M. Makino},
|
|
title = {Plasma polymer deposition from mixture of tetramethoxysilane and
|
|
oxygen on {PET} films and their oxygen gas barrier properties},
|
|
journal = {J. Appl. Polym. Sci.},
|
|
year = {1998},
|
|
volume = {64},
|
|
pages = {1031\,-\,1039},
|
|
number = {6},
|
|
doi = {10.1002/%28SICI%291097-4628%2819970509%2964%3A6%3C1031%3A%3AAID-APP1%3E3.0.CO%3B2-M},
|
|
file = {:DBD\\Inagaki-SiOx-oxygen-barrier-1996.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1002/\%28SICI\%291097-4628\%2819970509\%2964\%3A6\%3C1031\%3A\%3AAID-APP1\%3E3.0.CO\%3B2-M}
|
|
}
|
|
|
|
@ARTICLE{Ito07,
|
|
author = {T. Ito and others},
|
|
title = {Characterization of a microfluidic device fabricated using a photosensitive
|
|
sheet},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2007},
|
|
volume = {17},
|
|
pages = {432\,-\,438},
|
|
doi = {10.1088/0960-1317/17/3/003},
|
|
file = {Ito07.pdf:Photolacke\\Ito07.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/17/3/003}
|
|
}
|
|
|
|
@ARTICLE{Jack01,
|
|
author = {R.J. Jackman and T.M. Floyd and R. Ghodssi and M.A. Schmidt and K.F.
|
|
Jensen},
|
|
title = {Microfluidic systems with on-line UV detection fabricated in photodefinable
|
|
epoxy},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2001},
|
|
volume = {11},
|
|
pages = {1\,-\,8},
|
|
doi = {10.1088/0960-1317/11/3/316},
|
|
file = {Jack01.pdf:Photolacke\\Jack01.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/11/3/316}
|
|
}
|
|
|
|
@ARTICLE{Jens03,
|
|
author = {K.L. Jensen},
|
|
title = {Electron emission theory and its application: Fowler--Nordheim equation
|
|
and beyond},
|
|
journal = {J. Vac. Sci. Technol. B},
|
|
year = {2003},
|
|
volume = {21(4)},
|
|
pages = {1528\,-\,1544},
|
|
doi = {10.1116/1.1573664},
|
|
file = {:DBD\\2003_Electron emission theory and its application.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1116/1.1573664}
|
|
}
|
|
|
|
@ARTICLE{Jens02,
|
|
author = {K.L. Jensen},
|
|
title = {Theory of Field Emission},
|
|
journal = {Vacuum Microelectronics},
|
|
year = {2002},
|
|
volume = {Chapter 3},
|
|
pages = {33\,-\,104},
|
|
doi = {10.1002/0471224332.ch3},
|
|
url = {http://dx.doi.org/10.1002/0471224332.ch3}
|
|
}
|
|
|
|
@ARTICLE{Jide06,
|
|
author = {N. Jidenko and M. Petit and J.P. Borra},
|
|
title = {Electrical characterization of microdischarges produced by dielectric
|
|
barrier discharge in dry air at atmospheric pressure},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2006},
|
|
volume = {39},
|
|
pages = {281\,-\,293},
|
|
number = {2},
|
|
doi = {10.1088/0022-3727/39/2/008},
|
|
file = {:DBD\\Jidenko-Plasma-Control-2006.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/39/2/008}
|
|
}
|
|
|
|
@ARTICLE{Jigu06,
|
|
author = {S. Jigueta and M. Judelewicza and S. Mischlerb and A. Bertchc and
|
|
P. Renaudc},
|
|
title = {Effect of filler behavior on nanocomposite {SU8} photoresist for
|
|
moving micro-parts},
|
|
journal = {Microelectron. Eng.},
|
|
year = {2006},
|
|
volume = {83},
|
|
pages = {1273\,-\,1276},
|
|
doi = {10.1016/j.mee.2006.01.068},
|
|
file = {Jiguet_SU-8_filler.pdf:Photolacke\\Jiguet_SU-8_filler.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1016/j.mee.2006.01.068}
|
|
}
|
|
|
|
@ARTICLE{Kang03,
|
|
author = {W.S. Kang and J.M. Park and Y. Kim and S.H. Hong},
|
|
title = {Numerical study on influences of barrier arrangements on dielectric
|
|
barrier discharge characteristics},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {2003},
|
|
volume = {31},
|
|
pages = {504\,-\,510},
|
|
number = {4},
|
|
doi = {10.1109/TPS.2003.815469},
|
|
file = {:DBD\\Kang-StreamerSimulations-2003.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/TPS.2003.815469}
|
|
}
|
|
|
|
@ARTICLE{Kawa1969,
|
|
author = {H. Kawauchi and K. Tuzimura and H. Maeda and N. Ishida},
|
|
title = {Reaction of fluorescein-isothiocyanate with proteins and amino acids:
|
|
{II.} Preparation of FIuorescein-Thiohydantoin Amino Acids and Their
|
|
Thin-layer Chromatography},
|
|
journal = {Journal of Biochemistry},
|
|
year = {1969},
|
|
volume = {66},
|
|
pages = {783\,-\,789},
|
|
number = {6},
|
|
file = {:Allgemein\\Kawauchi-FITC-reaction-1969.pdf:PDF},
|
|
publisher = {Jpn Biochemical Soc},
|
|
url = {http://jb.oxfordjournals.org/cgi/content/abstract/66/6/783}
|
|
}
|
|
|
|
@INPROCEEDINGS{Kien04,
|
|
author = {J. Kieninger and G. Jobst and G. Igel and I. Moser and G. Urban},
|
|
title = {{3D} Polymer Microstructures by Laminating {SU-8} Films},
|
|
booktitle = {{Proceedings of \textmu TAS 2004}},
|
|
year = {2004},
|
|
volume = {2},
|
|
pages = {363\,-\,365},
|
|
file = {:Photolacke\\Kieninger-Manuscript_microTAS04_SU.-8pdf.pdf:PDF}
|
|
}
|
|
|
|
@ARTICLE{Kim04,
|
|
author = {K. Kim and others},
|
|
title = {{A tapered hollow metallic microneedle array using backside exposure
|
|
of SU-8}},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2004},
|
|
volume = {14},
|
|
pages = {597\,-\,603},
|
|
doi = {10.1088/0960-1317/14/4/021},
|
|
file = {Hollow Needles.pdf:Photolacke\\Hollow Needles.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/14/4/021}
|
|
}
|
|
|
|
@ARTICLE{Kim03,
|
|
author = {S.-O. Kim and J.G. Eden},
|
|
title = {Arrays of Microplasma Devices Fabricated in Photodefinable Glass
|
|
and Excited {AC or DC} by Interdigitated Electrodes},
|
|
journal = {IEEE Photonics Technology Letters},
|
|
year = {2005},
|
|
volume = {17},
|
|
pages = {1543\,-\,1545},
|
|
doi = {10.1109/LPT.2005.848260},
|
|
file = {:DBD\\Kim-Cavity Array Foturan-2005.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/LPT.2005.848260}
|
|
}
|
|
|
|
@INPROCEEDINGS{Kim08,
|
|
author = {Y.K. Kim and D. J. Kim},
|
|
title = {Deposition of super hydrophobic {a-C:F} films by dielectric barrier
|
|
discharge at atmospheric pressure},
|
|
booktitle = {Book of Abstract of 11th International Conference on Plasma Surface
|
|
Engineering PSE 2008},
|
|
year = {2008},
|
|
file = {:DBD\\Kim-CxFy-surface-DBD-2008.pdf:PDF},
|
|
url = {http://www.pse2008.net/pdf\_edit/tmp/PO1063-PSE2008-2f1418.pdf}
|
|
}
|
|
|
|
@ARTICLE{Klag07-2,
|
|
author = {C.P. Klages and C. Berger and M. Eichler and M. Thomas},
|
|
title = {Microplasma-Based Treatment of Inner Surfaces in Microfluidic Devices},
|
|
journal = {Contributions to Plasma Physics},
|
|
year = {2007},
|
|
volume = {47},
|
|
pages = {49\,-\,56},
|
|
doi = {10.1002/ctpp.200710008},
|
|
file = {:DBD\\Klages-plasmaprinting-channels-2007.pdf:PDF},
|
|
publisher = {WILEY-VCH Verlag Berlin},
|
|
url = {http://dx.doi.org/10.1002/ctpp.200710008}
|
|
}
|
|
|
|
@ARTICLE{Klag00,
|
|
author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
|
|
title = {Surface functionalization at atmospheric pressure by {DBD}-based
|
|
pulsed plasma polymerization},
|
|
journal = {Plasmas and Polymers},
|
|
year = {2000},
|
|
volume = {5},
|
|
pages = {79\,-\,89},
|
|
number = {2},
|
|
doi = {10.1023/A:1009583815474},
|
|
file = {:DBD\\Klages-Epoxy-groups-2000.pdf:PDF},
|
|
publisher = {Springer},
|
|
url = {\newline http://dx.doi.org/10.1023/A:1009583815474}
|
|
}
|
|
|
|
@ARTICLE{Klag07,
|
|
author = {C.P. Klages and others},
|
|
title = {Surface Technology with Cold Microplasmas},
|
|
journal = {Plasma Process. Polym.},
|
|
year = {2007},
|
|
volume = {4},
|
|
pages = {208\,-\,218},
|
|
number = {3},
|
|
doi = {10.1002/ppap.200600116},
|
|
file = {:DBD\\Klages-Overview-07.pdf:PDF},
|
|
publisher = {John Wiley \& Sons, Ltd},
|
|
url = {\newline http://dx.doi.org/10.1002/ppap.200600116}
|
|
}
|
|
|
|
@ARTICLE{Kogel03,
|
|
author = {U. Kogelschatz},
|
|
title = {Dielectric-barrier Discharges: Their History, Discharge Physics,
|
|
and Industrial Applications},
|
|
journal = {Plasma Chem. Plasma Process.},
|
|
year = {2003},
|
|
volume = {23},
|
|
pages = {1\,-\,46},
|
|
doi = {10.1023/A:1022470901385},
|
|
file = {kogelschatz.pdf:DBD\\kogelschatz.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1023/A:1022470901385}
|
|
}
|
|
|
|
@ARTICLE{Kogel02,
|
|
author = {U. Kogelschatz},
|
|
title = {Filamentary, Patterned, and Diffuse Barrier Discharges},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {2002},
|
|
volume = {30},
|
|
pages = {1400\,-\,1408},
|
|
number = {4},
|
|
doi = {10.1109/TPS.2002.804201},
|
|
file = {:DBD\\Kogelschatz-Filaments-2002.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/TPS.2002.804201}
|
|
}
|
|
|
|
@ARTICLE{Koid07,
|
|
author = {T. Koida and H. Fujiwara and M. Kondo},
|
|
title = {Hydrogen-doped $\mathrm{In_{2}O_{3}}$ as High-mobility Transparent
|
|
Conductive Oxide},
|
|
journal = {Jpn. J. Appl. Phys.},
|
|
year = {2007},
|
|
volume = {46},
|
|
pages = {L685\,-\,L687},
|
|
number = {28},
|
|
doi = {10.1143/JJAP.46.L685},
|
|
file = {:Allgemein\\Koida-ITO-2007.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1143/JJAP.46.L685}
|
|
}
|
|
|
|
@ARTICLE{Kozl05,
|
|
author = {K.V. Kozlov and others},
|
|
title = {Barrier discharges in {N2/O}2 mixtures},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2005},
|
|
volume = {38},
|
|
pages = {518\,-\,529},
|
|
doi = {10.1088/0022-3727/38/4/003},
|
|
file = {:DBD\\Kozlov-oxygen-impurity-2005.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/38/4/003}
|
|
}
|
|
|
|
@ARTICLE{Krei05,
|
|
author = {S. Kreitz and C. Penache and M. Thomas and C.-P. Klages},
|
|
title = {Patterned {DBD} treatment for area-selective metallization of polymers-plasma
|
|
printing},
|
|
journal = {Surf. Coat. Technol.},
|
|
year = {2005},
|
|
volume = {200},
|
|
pages = {676\,-\,679},
|
|
doi = {10.1016/j.surfcoat.2005.01.085},
|
|
file = {:DBD\\Kreitz05-Patterned DBD treatment.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1016/j.surfcoat.2005.01.085}
|
|
}
|
|
|
|
@ARTICLE{Kukh03,
|
|
author = {E. Kukharenka and M.M. Farooqui and L. Grigore and M. Kraft and N.
|
|
Hollinshead},
|
|
title = {Electroplating moulds using dry film thick negative photoresist.},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2003},
|
|
volume = {13},
|
|
pages = {S67\,-\,S74},
|
|
doi = {10.1088/0960-1317/13/4/311},
|
|
file = {Ordyl-1.pdf:Photolacke\\Ordyl-1.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/13/4/311}
|
|
}
|
|
|
|
@ARTICLE{Kunh00,
|
|
author = {E.E. Kunhardt},
|
|
title = {Generation of Large-Volume, Atmospheric-Pressure, Nonequilibrium
|
|
Plasmas},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {2000},
|
|
volume = {28},
|
|
pages = {189\,-\,200},
|
|
doi = {10.1109/27.842901},
|
|
file = {:DBD\\Kunhardt00-Frequency-Ignition.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/27.842901}
|
|
}
|
|
|
|
@ARTICLE{Kwak03,
|
|
author = {M.G. Kwak and others},
|
|
title = {Improvement of Luminance Efficiency in Xenon Dielectric Barrier Discharge
|
|
Flat Lamp},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {2003},
|
|
volume = {31},
|
|
pages = {176\,-\, 178},
|
|
doi = {10.1109/TPS.2003.808867},
|
|
file = {Kwak-Xenon-Lamp-2002.pdf:DBD\\Kwak-Xenon-Lamp-2002.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/TPS.2003.808867}
|
|
}
|
|
|
|
@ARTICLE{Lang05,
|
|
author = {B.A. Langowski and K.E. Uhrich},
|
|
title = {Microscale Plasma-Initiated Patterning (\textmu {PIP})},
|
|
journal = {Langmuir},
|
|
year = {2005},
|
|
volume = {21},
|
|
pages = {10509\,-\,10514},
|
|
doi = {10.1021/la052222m},
|
|
file = {:DBD\\Langowski-PDMS plasma patterning-2005.pdf:PDF},
|
|
url = {\newline http://dx.doi.org/10.1021/la052222m}
|
|
}
|
|
|
|
@UNPUBLISHED{Lede08,
|
|
author = {L. Ledernez and F. Olcaytug and G. Urban and H. Yasuda},
|
|
title = {Influence of the Electrode Material on the Electrical Breakdown of
|
|
Argon},
|
|
note = {accepted for Plasma Sources Science and Technology}
|
|
}
|
|
|
|
@ARTICLE{Leve1944,
|
|
author = {K. Levenberg},
|
|
title = {A method for the solution of certain non-linear problems in least
|
|
squares},
|
|
journal = {Q. Appl. Math},
|
|
year = {1944},
|
|
volume = {2},
|
|
pages = {164\,-\,168},
|
|
number = {2}
|
|
}
|
|
|
|
@ARTICLE{Lu08,
|
|
author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
|
|
title = {Low temperature plasma channels generated in microcavity trenches
|
|
with widths of 20\,-\,150\,\textmu{}m and aspect ratios as large
|
|
as 10\textsuperscript{4}\,:\,1},
|
|
journal = {Appl. Phys. Lett.},
|
|
year = {2008},
|
|
volume = {92},
|
|
pages = {1397\,-\,1402},
|
|
doi = {10.1063/1.2827197},
|
|
file = {:DBD\\Lu-Plasma channels-2008.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1063/1.2827197}
|
|
}
|
|
|
|
@ARTICLE{Lu07,
|
|
author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
|
|
title = {Microcavity Plasma Devices and Arrays Fabricated by Plastic-Based
|
|
Replica Molding},
|
|
journal = {J. Microelectromech. Syst.},
|
|
year = {2007},
|
|
volume = {16},
|
|
pages = {1397\,-\,1402},
|
|
doi = {10.1109/JMEMS.2006.886034},
|
|
file = {:DBD\\Lu-Microcavities by molding-2007.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/JMEMS.2006.886034}
|
|
}
|
|
|
|
@PHDTHESIS{Luca09,
|
|
author = {N. Lucas},
|
|
title = {Microplasma Stamps - An Atmospheric-Pressure Plasma Source for the
|
|
Area-Selective Modification of Surfaces},
|
|
school = {Institute for Microtechnology, TU Braunschweig},
|
|
year = {2009},
|
|
url = {http://www.shaker.de/Online-Gesamtkatalog/details.asp?ID=8983398&CC=3631&ISBN=3-8322-8008-1}
|
|
}
|
|
|
|
@ARTICLE{Luca08-2,
|
|
author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
|
|
title = {Microplasma stamps for selective surface modification: design and
|
|
characterization},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2008},
|
|
volume = {41},
|
|
pages = {215202 (7pp)},
|
|
doi = {10.1088/0022-3727/41/21/215202},
|
|
file = {:DBD\\Lucas-PDMS-Stamps-2.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/41/21/215202}
|
|
}
|
|
|
|
@ARTICLE{Luca08-1,
|
|
author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
|
|
title = {Design and optimization of dielectric barrier discharge microplasma
|
|
stamps},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2008},
|
|
volume = {41},
|
|
pages = {194012 (5pp)},
|
|
doi = {10.1088/0022-3727/41/19/194012},
|
|
file = {:DBD\\Lucas-PDMS-Stamps-1.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/41/19/194012}
|
|
}
|
|
|
|
@ARTICLE{Malk08,
|
|
author = {G.S. Malkov and others},
|
|
title = {Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic
|
|
and Hydrophobic Surface Chemistries},
|
|
journal = {Plasma Process. Polym.},
|
|
year = {2008},
|
|
volume = {5},
|
|
pages = {129\,-\,145},
|
|
number = {2},
|
|
doi = {10.1002/ppap.200700118},
|
|
file = {:DBD\\Malkov-SEM mask pattern-2008.pdf:PDF},
|
|
publisher = {John Wiley \& Sons, Ltd},
|
|
url = {http://dx.doi.org/10.1002/ppap.200700118}
|
|
}
|
|
|
|
@ARTICLE{Marq1963,
|
|
author = {Donald W. Marquardt},
|
|
title = {An Algorithm for Least-Squares Estimation of Nonlinear Parameters},
|
|
journal = {SIAM Journal on Applied Mathematics},
|
|
year = {1963},
|
|
volume = {11},
|
|
pages = {431\,-\,441},
|
|
number = {2},
|
|
doi = {10.1137/0111030},
|
|
publisher = {SIAM},
|
|
url = {http://dx.doi.org/10.1137\%2F0111030}
|
|
}
|
|
|
|
@ARTICLE{Mart04,
|
|
author = {C.R. Martin and I.A. Aksay},
|
|
title = {Submicrometer-scale patterning of ceramic thin films},
|
|
journal = {J. of Electroceramics},
|
|
year = {2004},
|
|
volume = {12},
|
|
pages = {53\,-\,68},
|
|
number = {1},
|
|
doi = {10.1023/B:JECR.0000034001.15359.98},
|
|
file = {:Allgemein\\Martin-Patterning-Ceramics-Overview-2004.pdf:PDF},
|
|
publisher = {Springer},
|
|
url = {http://dx.doi.org/10.1023/B:JECR.0000034001.15359.98}
|
|
}
|
|
|
|
@ARTICLE{Mart1997,
|
|
author = {C. Martinet and V. Paillard and A. Gagnaire and J. Joseph},
|
|
title = {Deposition of $\mathrm{SiO_2}$ and $\mathrm{TiO_2}$ thin films by
|
|
plasma enhanced chemical vapor deposition for antireflection coating},
|
|
journal = {J. Non-Cryst. Solids},
|
|
year = {1997},
|
|
volume = {216},
|
|
pages = {77\,-\,82},
|
|
doi = {10.1016/S0022-3093(97)00175-0},
|
|
file = {:DBD\\Martinet-SiO2-TiO2-1997.pdf:PDF},
|
|
url = {\href{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}}
|
|
}
|
|
|
|
@ARTICLE{Mass01,
|
|
author = {F. Massines and others},
|
|
title = {The role of dielectric barrier discharge atmosphere and physics on
|
|
polypropylene surface treatment},
|
|
journal = {Plasmas and Polymers},
|
|
year = {2001},
|
|
volume = {6},
|
|
pages = {35\,-\,49},
|
|
number = {1},
|
|
doi = {10.1023/A:1011365306501},
|
|
file = {:DBD\\Massines-oxygen-impurities-2001.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1023/A:1011365306501}
|
|
}
|
|
|
|
@ARTICLE{Masu1998,
|
|
author = {T. Masuzawa and T. Takawashi},
|
|
title = {{Recent trends in EDM/ECM technologies in Japan}},
|
|
journal = {VDI BERICHTE},
|
|
year = {1998},
|
|
volume = {1405},
|
|
pages = {1\,-\,16},
|
|
publisher = {VDI VERLAG GMBH}
|
|
}
|
|
|
|
@ARTICLE{Mata06,
|
|
author = {A. Mata and A.J. Fleischmann and S. Roy},
|
|
title = {Fabrication of multi-layer {SU-8} microstructures},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2006},
|
|
volume = {16},
|
|
pages = {276\,-\,284},
|
|
doi = {10.1088/0960-1317/16/2/012},
|
|
file = {SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/16/2/012}
|
|
}
|
|
|
|
@ARTICLE{Melz1996,
|
|
author = {K.A. Melzak and C.S. Sherwood and R.F.B. Turner and C.A. Haynes},
|
|
title = {Driving forces for {DNA} adsorption to silica in perchlorate solutions},
|
|
journal = {J. Colloid Interface Sci.},
|
|
year = {1996},
|
|
volume = {181},
|
|
pages = {635\,-\,644},
|
|
number = {2},
|
|
doi = {10.1006/jcis.1996.0421},
|
|
file = {:Allgemein\\Melzak-DNA-SiOx-Adsorption-1996.pdf:PDF},
|
|
publisher = {Elsevier},
|
|
url = {\newline http://dx.doi.org/10.1006/jcis.1996.0421}
|
|
}
|
|
|
|
@CONFERENCE{Menz02,
|
|
author = {W. Menz and R. Förster and A. Schoth and C. Müller},
|
|
title = {Non-conventional machining for microsystems},
|
|
booktitle = {Proc. 3rd Euspen Int. Conf.},
|
|
year = {2002},
|
|
pages = {37}
|
|
}
|
|
|
|
@ARTICLE{Mira00,
|
|
author = {S.F. Miralaï and others},
|
|
title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges
|
|
{(DBD) in He and N2} for Polymer Treatment},
|
|
journal = {Plasmas and Polymers},
|
|
year = {2000},
|
|
volume = {5},
|
|
pages = {63\,-\,77},
|
|
number = {2},
|
|
doi = {10.1023/A:1009531831404},
|
|
file = {:DBD\\Miralai-oxygen-impurity-2000.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1023/A:1009531831404}
|
|
}
|
|
|
|
@INPROCEEDINGS{TOK06,
|
|
author = {K. Misumi and others},
|
|
title = {Faster sensitivity and non-antimonite permanent photoresist for {MEMS}},
|
|
booktitle = {Advances in Resist Technology and Processing XXIII},
|
|
year = {2006},
|
|
editor = {Qinghuang Lin},
|
|
volume = {6153},
|
|
series = {Proceedings of SPIE},
|
|
pages = {61534F},
|
|
organization = {SPIE},
|
|
doi = {10.1117/12.656249},
|
|
file = {TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:Photolacke\\TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1117/12.656249}
|
|
}
|
|
|
|
@ARTICLE{TOK06-2,
|
|
author = {K. Misumi and K. Saito and A. Yamanouchi and T. Senzaki and H. Honma},
|
|
title = {Minute Tunnel Structure Formation with Permanent Film Photoresist},
|
|
journal = {J. Photopolym. Sci. Technol.},
|
|
year = {2006},
|
|
volume = {19},
|
|
pages = {57\,-\,62},
|
|
doi = {10.2494/photopolymer.19.57},
|
|
file = {TOK-Minute tunnel structure formation with permanent film photoresist.pdf:Photolacke\\TOK-Minute tunnel structure formation with permanent film photoresist.pdf:PDF},
|
|
url = {\newline http://dx.doi.org/10.2494/photopolymer.19.57}
|
|
}
|
|
|
|
@ARTICLE{Mull1988,
|
|
author = {W.M. Mullins and B.L. Averbach},
|
|
title = {Surface properties of silicon and aluminum oxide powders},
|
|
journal = {Surface Science},
|
|
year = {1988},
|
|
volume = {206},
|
|
pages = {41\,-\,51},
|
|
number = {1-2},
|
|
doi = {10.1016/0039-6028(88)90013-1},
|
|
file = {:DBD\\Mullins-Work function of AluOxide-1988.pdf:PDF},
|
|
publisher = {Elsevier},
|
|
url = {\href{http://dx.doi.org/10.1016/0039-6028(88)90013-1}{http://dx.doi.org/10.1016/0039-6028(88)90013-1}}
|
|
}
|
|
|
|
@ARTICLE{Murp1956,
|
|
author = {E.L. Murphy and R.H. {Good, Jr.}},
|
|
title = {Thermionic Emission, Field Emission, and the Transition Region},
|
|
journal = {Phys. Rev.},
|
|
year = {1956},
|
|
volume = {102},
|
|
pages = {1464 - 1473},
|
|
doi = {10.1103/PhysRev.102.1464},
|
|
file = {:DBD\\Murphy,Good - Thermionic Emission, Field Emission, and the Transition Region.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1103/PhysRev.102.1464}
|
|
}
|
|
|
|
@ARTICLE{Muel1999,
|
|
author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
|
|
Boeuf},
|
|
title = {Self-Organized Filaments in Dielectric Barrier Glow Discharges},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {1999},
|
|
volume = {27},
|
|
pages = {20\,-\,21},
|
|
doi = {10.1109/27.763004},
|
|
file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/27.763004}
|
|
}
|
|
|
|
@ARTICLE{Naka01,
|
|
author = {A. Nakajima and K. Hashimoto and T. Watanabe},
|
|
title = {Recent studies on super-hydrophobic films},
|
|
journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
|
|
year = {2001},
|
|
volume = {132},
|
|
pages = {31\,-\,41},
|
|
doi = {10.1007/s007060170142},
|
|
file = {:Allgemein\\TiO2-hydrophobic-Nakajima-2001.pdf:PDF},
|
|
publisher = {Springer},
|
|
url = {http://dx.doi.org/10.1007/s007060170142}
|
|
}
|
|
|
|
@ARTICLE{Niem1995,
|
|
author = {L. Niemeyer},
|
|
title = {A generalized approach to partial discharge modeling},
|
|
journal = {IEEE Transactions on Dielectrics and Electrical Insulation},
|
|
year = {1995},
|
|
volume = {2},
|
|
pages = {510\,-\,528},
|
|
number = {4},
|
|
doi = {10.1109/94.407017},
|
|
file = {:DBD\\Niemeyer 95 generalized approach partial discharges.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/94.407017}
|
|
}
|
|
|
|
@ARTICLE{Noes04,
|
|
author = {M. Noeske and J. Degenhardt and S. Strudthoff and U. Lommatzsch},
|
|
title = {Plasma jet treatment of five polymers at atmospheric pressure: surface
|
|
modifications and the relevance for adhesion},
|
|
journal = {International Journal of Adhesion \& Adhesives},
|
|
year = {2004},
|
|
volume = {24},
|
|
pages = {171\,-\,177},
|
|
doi = {10.1016/j.ijadhadh.2003.09.006},
|
|
file = {:DBD\\Noeske03-plasma jet treatment.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1016/j.ijadhadh.2003.09.006}
|
|
}
|
|
|
|
@ARTICLE{Nord1928,
|
|
author = {L. Nordheim},
|
|
title = {Zur Theorie der thermischen Emission und der Reflexion von Elektronen
|
|
an Metallen},
|
|
journal = {Zeitschrift für Physik A Hadrons and Nuclei},
|
|
year = {1928},
|
|
volume = {46},
|
|
pages = {833\,-\,855},
|
|
number = {11\,-\,12},
|
|
month = {November},
|
|
doi = {10.1007/BF01391020},
|
|
file = {:DBD\\Nordheim-1928.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1007/BF01391020}
|
|
}
|
|
|
|
@CONFERENCE{Nuss09,
|
|
author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
|
|
title = {Micromixing Structures for Lab-on Chip Applications: Fabrication
|
|
and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
|
|
booktitle = {4M\,/\,ICOMM 2009 Conference},
|
|
year = {2009},
|
|
pages = {215\,-\,218},
|
|
doi = {10.1243/17547164C0012009041},
|
|
file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
|
|
owner = {usti},
|
|
url = {http://dx.doi.org/10.1243/17547164C0012009041}
|
|
}
|
|
|
|
@ARTICLE{Obri01,
|
|
author = {J. O'Brien},
|
|
title = {Advanced photoresist technologies for microsystems},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2001},
|
|
volume = {11},
|
|
pages = {353\,-\,358},
|
|
doi = {10.1088/0960-1317/11/4/312},
|
|
file = {OBrien01.pdf:Photolacke\\OBrien01.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/11/4/312}
|
|
}
|
|
|
|
@ARTICLE{Ohl1999,
|
|
author = {A. Ohl and K. Schröder},
|
|
title = {Plasma-induced chemical micropatterning for cell culturing applications:
|
|
a brief review},
|
|
journal = {Surf. Coat. Technol.},
|
|
year = {1999},
|
|
volume = {116},
|
|
pages = {820\,-\,830},
|
|
doi = {10.1016/S0257-8972(99)00150-4},
|
|
file = {:DBD\\Ohl-SEM grid pattern-1999.pdf:PDF},
|
|
publisher = {Elsevier},
|
|
url = {\href{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}}
|
|
}
|
|
|
|
@PHDTHESIS{Olss1998,
|
|
author = {Anders Olsson},
|
|
title = {Valve-less Diffuser Micropumps},
|
|
school = {School of Electrical Engineering, Royal Institute of Technology,
|
|
Stockholm, Sweden},
|
|
year = {1998},
|
|
file = {:Allgemein\\1998 Valve-less diffuser micropumps.pdf:PDF},
|
|
url = {http://www.s3.kth.se/instrlab/research/dissertations/pdf/andersodoc.pdf}
|
|
}
|
|
|
|
@ARTICLE{Pan02,
|
|
author = {C.-T. Pan and H. Yang and S.-C. Shen and M.-C. Chou and H.-P. Chou},
|
|
title = {A low-temperature wafer bonding technique using patternable materials},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2002},
|
|
volume = {12},
|
|
pages = {611\,-\,615},
|
|
doi = {10.1088/0960-1317/12/5/315},
|
|
file = {Wafer-Bonding-Pan.pdf:Photolacke\\Wafer-Bonding-Pan.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/12/5/315}
|
|
}
|
|
|
|
@ARTICLE{Park01,
|
|
author = {J. Park and I. Henins and H.W. Herrmann and G.S. Selwyn},
|
|
title = {Discharge phenomena of an atmospheric pressure radio-frequency capacitive
|
|
plasma source},
|
|
journal = {J. Appl. Phys.},
|
|
year = {2001},
|
|
volume = {89},
|
|
pages = {20\,-\,28},
|
|
doi = {10.1063/1.1323753},
|
|
file = {:DBD\\Park01-Discharge phenomena.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1063/1.1323753}
|
|
}
|
|
|
|
@ARTICLE{Park05,
|
|
author = {S.-J. Park and K.S. Kim and J.G. Eden},
|
|
title = {Nanoporous alumina as a dielectric for microcavity plasma devices:
|
|
Multilayer {Al/AlO} structures},
|
|
journal = {Appl. Phys. Lett.},
|
|
year = {2005},
|
|
volume = {86},
|
|
pages = {221501},
|
|
doi = {10.1063/1.1923747},
|
|
file = {:DBD\\Park-Cavitiy Al2O3-2005.pdf:PDF},
|
|
publisher = {AIP},
|
|
url = {http://dx.doi.org/10.1063/1.1923747}
|
|
}
|
|
|
|
@ARTICLE{Pasc1889,
|
|
author = {F. Paschen},
|
|
title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
|
|
bei verschiedenen Drucken erforderliche Potentialdifferenz}},
|
|
journal = {Annalen der Physik},
|
|
year = {1889},
|
|
volume = {273},
|
|
pages = {69\,-\,96},
|
|
number = {5},
|
|
doi = {10.1002/andp.18892730505},
|
|
file = {:DBD\\Paschen-1889.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1002/andp.18892730505}
|
|
}
|
|
|
|
@ARTICLE{Payn02,
|
|
author = {W.G. Payne and B.W. James and I.S. Falconer},
|
|
title = {The Growth and Decay of Miniature Dielectric Barrier Discharges in
|
|
Helium, Neon, and Argon},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {2002},
|
|
volume = {30},
|
|
pages = {170\,-\,171},
|
|
doi = {10.1109/TPS.2002.1003978},
|
|
file = {Payne-Discharge-Growth-2002.pdf:DBD\\Payne-Discharge-Growth-2002.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/TPS.2002.1003978}
|
|
}
|
|
|
|
@MISC{PCI,
|
|
author = {{PCI-SIG}},
|
|
title = {{PCI} Conventional specifications},
|
|
howpublished = {Internet:\newline http://www.pcisig.com/specifications/conventional
|
|
(accessed 08-01-2010)},
|
|
url = {http://www.pcisig.com/specifications/conventional}
|
|
}
|
|
|
|
@ARTICLE{Pena04,
|
|
author = {C. Penache and C. Gessner and T. Betker and V. Bartels and C.-P.
|
|
Klages},
|
|
title = {Plasma printing: patterned surface functionalisation and coating
|
|
at atmospheric pressure},
|
|
journal = {IEE Proc.-Nanobiotechnol.},
|
|
year = {2004},
|
|
volume = {151},
|
|
pages = {139\,-\,144},
|
|
booktitle = {Proceedings. 2nd VDE World Microtechnologies Congress, October 13
|
|
- 15, 2003},
|
|
doi = {10.1049/ip-nbt:20040836},
|
|
file = {:DBD\\Penache04-Printing.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1049/ip-nbt:20040836}
|
|
}
|
|
|
|
@ARTICLE{Phel1999,
|
|
author = {A.V. Phelps and Z.Lj. Petrovic},
|
|
title = {Cold-cathode discharges and breakdown in argon: surface and gas phase
|
|
production of secondary electrons},
|
|
journal = {Plasma Sources Sci. Technol.},
|
|
year = {1999},
|
|
volume = {8},
|
|
pages = {21\,-\,44},
|
|
doi = {10.1088/0963-0252/8/3/201},
|
|
file = {:DBD\\Phelps-Petrovic-Secondary-emission-1999.pdf:PDF},
|
|
publisher = {IOP PUBLISHING},
|
|
url = {http://dx.doi.org/10.1088/0963-0252/8/3/201}
|
|
}
|
|
|
|
@INPROCEEDINGS{Rada07,
|
|
author = {A.D. Radadia and L. Cao and H.-K. Jeong and M.A. Shannon and R.I.
|
|
Masel},
|
|
title = {A {3D} Micromoxer Fabricated with Dry Film Resist},
|
|
booktitle = {Proc. of MEMS 2007},
|
|
year = {2007},
|
|
pages = {361\,-\,364},
|
|
doi = {10.1109/MEMSYS.2007.4433110},
|
|
file = {:Photolacke\\Radadia-3D micromixer-2007.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/MEMSYS.2007.4433110}
|
|
}
|
|
|
|
@ARTICLE{Radm07,
|
|
author = {M. Radmilovic-Radjenovic and Z.L. Petrovic and B. Radjenovic},
|
|
title = {Modelling of breakdown behavior by {PIC/MCC} code with improved secondary
|
|
emission models},
|
|
journal = {J. Phys.: Conf. Ser.},
|
|
year = {2007},
|
|
volume = {71},
|
|
pages = {012007},
|
|
number = {1},
|
|
booktitle = {Journal of Physics: Conference Series},
|
|
doi = {10.1088/1742-6596/71/1/012007},
|
|
file = {:DBD\\Radjenovic-secondary-emisson-2007.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/1742-6596/71/1/012007}
|
|
}
|
|
|
|
@ARTICLE{Radu03,
|
|
author = {I. Radu and R. Bartnikas and G. Czeremuszkin and M.R. Wertheimer},
|
|
title = {Diagnostics of Dielectric Barrier Discharges in Noble Gases: Atmospheric
|
|
Pressure Glow and Pseudoglow Discharges and Spatio-Temporal Patterns},
|
|
journal = {IEEE Trans. Plasma Sci.},
|
|
year = {2003},
|
|
volume = {31},
|
|
pages = {411\,-\,421},
|
|
number = {3},
|
|
doi = {10.1109/TPS.2003.811647},
|
|
file = {:DBD\\Radu-filament-noble-gases-2003.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/TPS.2003.811647}
|
|
}
|
|
|
|
@ARTICLE{Radu05,
|
|
author = {I. Radu and R. Bartnikas and M.R. Wertheimer},
|
|
title = {Diagnostics and modelling of noble gas atmospheric pressure dielectric
|
|
barrier discharges in homogeneous or diverging electric fields},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2005},
|
|
volume = {38},
|
|
pages = {539\,-\,546},
|
|
doi = {10.1088/0022-3727/38/4/005},
|
|
file = {Radu-filament-noble-gases-2005.pdf:DBD\\Radu-filament-noble-gases-2005.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/38/4/005}
|
|
}
|
|
|
|
@ARTICLE{Rao05,
|
|
author = {R.B. Rao and K.L. Krafcik and A.M. Morales and J. Lewis},
|
|
title = {Microfabricated deposition nozzles for direct-write assembly of three-dimensional
|
|
periodic structures},
|
|
journal = {Adv. Mater.},
|
|
year = {2005},
|
|
volume = {17},
|
|
pages = {289\,-\,293},
|
|
number = {3},
|
|
doi = {10.1002/adma.200400514},
|
|
file = {:Allgemein\\Rao-3D-ink-hexagonal-2005.pdf:PDF},
|
|
publisher = {Wiley-VCH Verlag GmbH},
|
|
url = {http://dx.doi.org/10.1002/adma.200400514}
|
|
}
|
|
|
|
@BOOK{Rich1921,
|
|
title = {The Emission of Electricity from Hot Bodies},
|
|
publisher = {Longmans, Green and co.},
|
|
year = {1921},
|
|
author = {O.W. Richardson},
|
|
url = {http://www.worldcat.org/wcpa/oclc/946804}
|
|
}
|
|
|
|
@ARTICLE{Sarr06,
|
|
author = {C. Sarra-Bournet and S. Turgeon and D. Mantovani and G. Laroche},
|
|
title = {A study of atmospheric pressure plasma discharges for surface functionalization
|
|
of {PTFE} used in biomedical applications},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2006},
|
|
volume = {39},
|
|
pages = {3461\,-\,3469},
|
|
number = {16},
|
|
doi = {10.1088/0022-3727/39/16/S03},
|
|
file = {:DBD\\Sarra-Bournet-treatment-time-2006.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/39/16/S03}
|
|
}
|
|
|
|
@ARTICLE{Sawa1995,
|
|
author = {Y. Sawada and S. Ogawa and M. Kogoma},
|
|
title = {Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane
|
|
films prepared by atmospheric pressure glow discharge},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {1995},
|
|
volume = {28},
|
|
pages = {1661\,-\,1661},
|
|
doi = {10.1088/0022-3727/28/8/015},
|
|
file = {:DBD\\Sawada-TEOS-SiOx-1995.pdf:PDF},
|
|
publisher = {IOP PUBLISHING LTD},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/28/8/015}
|
|
}
|
|
|
|
@ARTICLE{Sche07,
|
|
author = {A. Schenk and others},
|
|
title = {Microstructured Electrode Arrays: Optical analysis of the Glow Discharge
|
|
in a Magnified Electrode Gap},
|
|
journal = {Plasma Process. Polym.},
|
|
year = {2007},
|
|
volume = {4},
|
|
pages = {S927\,-\,S930},
|
|
doi = {10.1002/ppap.200732301},
|
|
file = {:DBD\\Schenk-Optical-Analysis.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1002/ppap.200732301}
|
|
}
|
|
|
|
@ARTICLE{Scho04,
|
|
author = {K.H. Schoenbach and M. Moselhy and W. Shi},
|
|
title = {Self-organization in cathode boundary layer microdischarges},
|
|
journal = {Plasma Sources Sci. Technol.},
|
|
year = {2004},
|
|
volume = {13},
|
|
pages = {177\,-\,185},
|
|
number = {1},
|
|
doi = {10.1088/0963-0252/13/1/023},
|
|
file = {:DBD\\Schoenbach-FilamentDiameter-2004.pdf:PDF},
|
|
publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
|
|
c1991-},
|
|
url = {http://dx.doi.org/10.1088/0963-0252/13/1/023}
|
|
}
|
|
|
|
@ARTICLE{Scho1999,
|
|
author = {U.P Schönholzer and L.J. Gauckler},
|
|
title = {Ceramic parts patterned in the micrometer range},
|
|
journal = {Adv. Mater.},
|
|
year = {1999},
|
|
volume = {11},
|
|
pages = {630\,-\,632},
|
|
number = {8},
|
|
file = {:Allgemein\\Schoenholzer-KeramikStrukturiertSintern1-1999.pdf:PDF},
|
|
publisher = {WILEY-VCH Verlag GmbH Weinheim},
|
|
url = {\href{http://www.cheric.org/research/tech/periodicals/doi.php?art_seq=646499}{http://www.cheric.org/research/tech/periodicals/doi.php?art\_seq=\newline 646499}}
|
|
}
|
|
|
|
@ARTICLE{Smit00,
|
|
author = {R.C. Smith and others},
|
|
title = {Chemical vapour deposition of the oxides of titanium, zirconium and
|
|
hafnium for use as high-k materials in microelectronic devices. A
|
|
carbon-free precursor for the synthesis of hafnium dioxide},
|
|
journal = {Adv. Mater. Opt. and Electron.},
|
|
year = {2000},
|
|
volume = {10},
|
|
pages = {105\,-\,114},
|
|
number = {3-5},
|
|
doi = {10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J},
|
|
file = {:DBD\\Smith-Ti-and-others-2000.pdf:PDF},
|
|
publisher = {John Wiley \& Sons, Ltd. Chichester, UK},
|
|
url = {\href{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}}
|
|
}
|
|
|
|
@BOOK{Socr1994,
|
|
title = {Infrared and Raman characteristic group frequencies: tables and charts},
|
|
publisher = {John Wiley \& Sons},
|
|
year = {1994},
|
|
author = {G. Socrates},
|
|
edition = {2nd}
|
|
}
|
|
|
|
@MISC{Lightning,
|
|
author = {J. R. Southern},
|
|
title = {Toronto thunderstorm},
|
|
howpublished = {Internet: \newline http://en.wikipedia.org/wiki/File:Krunkwerke\_-\_IMG\_4515\_\%28by-sa\%29.jpg
|
|
(accessed 07-09-2009)},
|
|
url = {http://en.wikipedia.org/wiki/File:Krunkwerke_-_IMG_4515_%28by-sa%29.jpg}
|
|
}
|
|
|
|
@CONFERENCE{Stal07,
|
|
author = {O. Stalter and B. Burger and S. Lehrmann},
|
|
title = {{Silicon Carbide (SiC) D-MOS for grid-feeding solar-inverters}},
|
|
booktitle = {European Conference on Power Electronics and Applications, 2007},
|
|
year = {2007},
|
|
pages = {1\,-\,10},
|
|
doi = {10.1109/EPE.2007.4417654},
|
|
file = {:Allgemein\\Stalter-SiC-Inverters-2007.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/EPE.2007.4417654}
|
|
}
|
|
|
|
@ARTICLE{Star06,
|
|
author = {S.M. Starikovskaia},
|
|
title = {Plasma assisted ignition and combustion},
|
|
journal = {J. Phys. D: Appl. Phys.},
|
|
year = {2006},
|
|
volume = {39},
|
|
pages = {R265\,-\,R299},
|
|
number = {16},
|
|
doi = {10.1088/0022-3727/39/16/R01},
|
|
file = {:DBD\\Starikovskaia-Streamer-overview-2006.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0022-3727/39/16/R01}
|
|
}
|
|
|
|
@ARTICLE{Step07,
|
|
author = {K. Stephan and others},
|
|
title = {Fast prototyping using a dry film photoresist: microfabrication of
|
|
soft-lithography masters for microfluidic structures},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2007},
|
|
volume = {17},
|
|
pages = {N69\,-\,N74},
|
|
doi = {10.1088/0960-1317/17/10/N01},
|
|
file = {:Photolacke\\Stephan-DFR-Etertec-HQ-2007.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/17/10/N01}
|
|
}
|
|
|
|
@ARTICLE{Stoe10,
|
|
author = {U. Stöhr and others},
|
|
title = {Porous photoresist stamps for selective plasma treatment},
|
|
journal = {Plasma Processes Polym.},
|
|
year = {2010},
|
|
volume = {7},
|
|
pages = {9\,-\,15},
|
|
number = {1},
|
|
doi = {10.1002/ppap.200900063},
|
|
file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
|
|
url = {\newline http://dx.doi.org/10.1002/ppap.200900063}
|
|
}
|
|
|
|
@ARTICLE{Stoe09,
|
|
author = {Uwe Stöhr and others},
|
|
title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer
|
|
Scales},
|
|
journal = {Plasma Process. Polym.},
|
|
year = {2009},
|
|
volume = {6},
|
|
pages = {228\,-\,233},
|
|
number = {4},
|
|
doi = {10.1002/ppap.200800217},
|
|
file = {:DBD\\PlasmaPaper-Photoresist-finally-printed.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1002/ppap.200800217}
|
|
}
|
|
|
|
@ARTICLE{Stoe08,
|
|
author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
|
|
title = {High-resolution permanent photoresist laminate for microsystem applications},
|
|
journal = {J. Micro/Nanolith. MEMS MOEMS},
|
|
year = {2008},
|
|
volume = {7},
|
|
pages = {033009},
|
|
doi = {10.1117/1.2964217},
|
|
file = {:Photolacke\\TMMFPaperSPIE-2Draft.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1117/1.2964217}
|
|
}
|
|
|
|
@ARTICLE{Suk07,
|
|
author = {J.W. Suk and J. Cho},
|
|
title = {Capillary flow control using hydrophobic patterns},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2007},
|
|
volume = {17},
|
|
pages = {N11\,-\,N15},
|
|
number = {4},
|
|
doi = {10.1088/0960-1317/17/4/N01},
|
|
file = {:Allgemein\\Suk-hydrophobic-channels-2007.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/17/4/N01}
|
|
}
|
|
|
|
@ARTICLE{Tan06,
|
|
author = {H.M.L. Tan and T. Akagi and T. Ichiki},
|
|
title = {Localized Plasma Treatment of Poly(dimethylsiloxane) Surfaces and
|
|
Its Application to Controlled Cell Cultivation},
|
|
journal = {J. Photopolym. Sci. Technol.},
|
|
year = {2006},
|
|
volume = {19},
|
|
pages = {245\,-\,250},
|
|
doi = {10.2494/photopolymer.19.245},
|
|
file = {:DBD\\Tan06-Plasmajet.pdf:PDF},
|
|
url = {http://dx.doi.org/10.2494/photopolymer.19.245}
|
|
}
|
|
|
|
@MISC{LyX,
|
|
author = {{The LyX Team}},
|
|
title = {LyX 1.6.x},
|
|
howpublished = {Internet: http://www.lyx.org},
|
|
url = {http://www.lyx.org}
|
|
}
|
|
|
|
@ARTICLE{Ther03,
|
|
author = {D. Therriault and S.R. White and J.A. Lewis},
|
|
title = {Chaotic mixing in three-dimensional microvascular networks fabricated
|
|
by direct-write assembly},
|
|
journal = {Nature Materials},
|
|
year = {2003},
|
|
volume = {2},
|
|
pages = {265\,-\,271},
|
|
number = {4},
|
|
doi = {10.1038/nmat863},
|
|
file = {:Allgemein\\Therriault-Ink-Channels-2003.pdf:PDF},
|
|
publisher = {Nature Publishing Group},
|
|
url = {http://dx.doi.org/10.1038/nmat863}
|
|
}
|
|
|
|
@INPROCEEDINGS{Thom06,
|
|
author = {M. Thomas and M. Eichler and C.-P. Klages},
|
|
title = {Coating with Atmospheric Pressure Plasma Processes: From Large Area
|
|
to \textmu{}-Structures},
|
|
booktitle = {49th Annual Technical Conference Proceedings},
|
|
year = {2006},
|
|
organization = {Society of Vacuum Coaters},
|
|
url = {http://tinyurl.com/Thomas06}
|
|
}
|
|
|
|
@ARTICLE{Thom07,
|
|
author = {M. Thomas and M. von Hausen and C.-P. Klages and P. Baumhof},
|
|
title = {Generation of Stable Coatings with Carboxylic Groups by Copolymerization
|
|
of {MAA} and {VTMS} using {DBD} at Atmospheric Pressure},
|
|
journal = {Plasma Process. Polym.},
|
|
year = {2007},
|
|
volume = {4},
|
|
pages = {S475\,-\,S481},
|
|
doi = {10.1002/ppap.200731210},
|
|
file = {:DBD\\Thomas-Carboxy-groups-2007.pdf:PDF},
|
|
publisher = {WILEY-VCH Verlag Weinheim},
|
|
url = {http://dx.doi.org/10.1002/ppap.200731210}
|
|
}
|
|
|
|
@BOOK{Town1915,
|
|
title = {Electricity in Gases},
|
|
publisher = {Clarendon Press},
|
|
year = {1915},
|
|
author = {J.S. Townsend},
|
|
url = {http://www.worldcat.org/wcpa/oclc/4294747}
|
|
}
|
|
|
|
@BOOK{Town1910,
|
|
title = {The Theory of Ionization of Gases by Collision},
|
|
publisher = {Constable},
|
|
year = {1910},
|
|
author = {J.S. Townsend},
|
|
url = {http://www.worldcat.org/wcpa/oclc/8460026}
|
|
}
|
|
|
|
@ARTICLE{Tsai06-2,
|
|
author = {Y.-C. Tsai and H.-P. Jen and K.-W. Lin and Y.-Z. Hsie},
|
|
title = {Fabrication of microfluidic devices using dry film photoresist for
|
|
microchip capillary electrophoresis},
|
|
journal = {J. Chromatogr. A},
|
|
year = {2006},
|
|
volume = {1111},
|
|
pages = {267\,-\,271},
|
|
doi = {0.1016/j.chroma.2005.12.003},
|
|
file = {AF-5000-Photolack-2.pdf:Photolacke\\AF-5000-Photolack-2.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1016/j.chroma.2005.12.003}
|
|
}
|
|
|
|
@ARTICLE{Tsai06-1,
|
|
author = {Y.-C. Tsai and S.-J. Yang and H.-T. Lee and H.-P. Jen and Y.-Z. Hsieh},
|
|
title = {Fabrication of a Flexible and Disposable Microreactor Using a Dry
|
|
Film Photoresist},
|
|
journal = {J. Chin. Chem. Soc.},
|
|
year = {2006},
|
|
volume = {53},
|
|
pages = {683\,-\,688},
|
|
file = {AF-5000-Photolack.pdf:Photolacke\\AF-5000-Photolack.pdf:PDF},
|
|
url = {http://nr.stpi.org.tw/ejournal/ChiChemSociety/2006/EJ52-2006-683.pdf}
|
|
}
|
|
|
|
@ARTICLE{Uden1972,
|
|
author = {S. Udenfriend and others},
|
|
title = {Fluorescamine: A Reagent for Assay of Amino Acids, Peptides, Proteins,
|
|
and Primary Amines in the Picomole Range},
|
|
journal = {Science},
|
|
year = {1972},
|
|
volume = {178},
|
|
pages = {871\,-\,872},
|
|
doi = {10.1126/science.178.4063.871},
|
|
file = {:Allgemein\\Udenfriend-Fluorescamine-1972.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1126/science.178.4063.871}
|
|
}
|
|
|
|
@ARTICLE{Velt05,
|
|
author = {T. Velten and others},
|
|
title = {Packaging of Bio-MEMS: Strategies, Technologies, and Applications},
|
|
journal = {IEEE trans. adv. packag.},
|
|
year = {2005},
|
|
volume = {28},
|
|
pages = {533\,-\,546},
|
|
doi = {10.1109/TADVP.2005.858427},
|
|
file = {Velten05-review.pdf:Photolacke\\Velten05-review.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1109/TADVP.2005.858427}
|
|
}
|
|
|
|
@ARTICLE{Vora05,
|
|
author = {K.D. Vora and B.Y. Shew and E.C. Harvey and J.P. Hayes and A.G. Peele},
|
|
title = {{Specification of mechanical support structures to prevent SU-8 stiction
|
|
in high aspect ratio structures}},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2005},
|
|
volume = {15},
|
|
pages = {978\,-\,983},
|
|
doi = {10.1088/0960-1317/15/5/012},
|
|
file = {SU-8-Aspektverhaeltnis-jmm2005.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm2005.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/15/5/012}
|
|
}
|
|
|
|
@CONFERENCE{Vult07,
|
|
author = {P. Vulto and G. Igel and G.A. Urban},
|
|
title = {Full wafer fabrication process for microfluidic glass chips with
|
|
electroplated electrodes},
|
|
booktitle = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
|
|
TRANSDUCERS 2007.},
|
|
year = {2007},
|
|
pages = {117\,-\,120},
|
|
doi = {10.1109/SENSOR.2007.4300085},
|
|
file = {:Photolacke\\Vult07.pdf:PDF},
|
|
journal = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
|
|
TRANSDUCERS 2007.},
|
|
url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=4300085}
|
|
}
|
|
|
|
@INPROCEEDINGS{Vult06-2,
|
|
author = {P. Vulto and C. Klaunick and G. Igel and G. Urban},
|
|
title = {{tmRNA} purification by electrophoretic filtration for genomic identification
|
|
of bacteria on-a-chip},
|
|
booktitle = {Proceedings of \textmu{}TAS 2006},
|
|
year = {2006},
|
|
volume = {2},
|
|
pages = {377\,-\,379},
|
|
file = {:Photolacke\\tmRNA purification - MicroTAS2006.pdf:PDF}
|
|
}
|
|
|
|
@ARTICLE{Vult06,
|
|
author = {P. Vulto and others},
|
|
title = {Selective sample recovery of DEP-separated cells and particles by
|
|
phaseguide-controlled laminar flow},
|
|
journal = {J. Micromech. Microeng.},
|
|
year = {2006},
|
|
volume = {16},
|
|
pages = {1847\,-\,1853},
|
|
doi = {10.1088/0960-1317/16/9/013},
|
|
file = {Vult06.pdf:Photolacke\\Vult06.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/0960-1317/16/9/013}
|
|
}
|
|
|
|
@ARTICLE{Vult05,
|
|
author = {P. Vulto and others},
|
|
title = {Microfluidic channel fabrication in dry film resist for production
|
|
and prototyping of hybrid chips},
|
|
journal = {Lab on a Chip},
|
|
year = {2005},
|
|
volume = {5},
|
|
pages = {158\,-\,162},
|
|
doi = {10.1039/b411885e},
|
|
file = {Vulto-Ordyl.pdf:Photolacke\\Vulto-Ordyl.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1039/b411885e}
|
|
}
|
|
|
|
@ARTICLE{Wang06,
|
|
author = {C. Wang and X. He},
|
|
title = {Polypropylene surface modification model in atmospheric pressure
|
|
dielectric barrier discharge},
|
|
journal = {Surface \& Coatings Technology},
|
|
year = {2006},
|
|
volume = {201},
|
|
pages = {3377\,-\,3384},
|
|
number = {6},
|
|
doi = {10.1016/j.surfcoat.2006.07.205},
|
|
file = {:DBD\\Wang-PP-Contact-Angle-2006.pdf:PDF},
|
|
publisher = {Elsevier},
|
|
url = {http://dx.doi.org/10.1016/j.surfcoat.2006.07.205}
|
|
}
|
|
|
|
@CONFERENCE{Wash05,
|
|
author = {Y. Washio and others},
|
|
title = {Multilayer ultra thick resist development for {MEMS}},
|
|
booktitle = {Proceedings of SPIE},
|
|
year = {2005},
|
|
volume = {5753},
|
|
pages = {959},
|
|
doi = {10.1117/12.600227},
|
|
url = {http://dx.doi.org/10.1117/12.600227}
|
|
}
|
|
|
|
@ARTICLE{Will04,
|
|
author = {J.D. Williams and W. Wang},
|
|
title = {Microfabrication of an electromagnetic power relay using {SU-8 based
|
|
UV-LIGA} technology},
|
|
journal = {Microsystem Technologies},
|
|
year = {2004},
|
|
volume = {10},
|
|
pages = {699\,-\,705},
|
|
doi = {10.1007/s00542-004-0396-1},
|
|
file = {SU-8-Aspektverhaeltnis-2.pdf:Photolacke\\SU-8-Aspektverhaeltnis-2.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1007/s00542-004-0396-1}
|
|
}
|
|
|
|
@ARTICLE{Xu07,
|
|
author = {X. Xu and L. Li and S. Wang and L. Zhao and T. Ye},
|
|
title = {Deposition of $\mathrm{SiO_x}$ films with a capacitively-coupled
|
|
plasma at atmospheric pressure},
|
|
journal = {Plasma Sources Sci. Technol.},
|
|
year = {2007},
|
|
volume = {16},
|
|
pages = {372\,-\,376},
|
|
number = {2},
|
|
doi = {10.1088/0963-0252/16/2/021},
|
|
file = {:DBD\\Xu-SiOx-DBD-2007.pdf:PDF},
|
|
publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
|
|
c1991-},
|
|
url = {http://dx.doi.org/10.1088/0963-0252/16/2/021}
|
|
}
|
|
|
|
@ARTICLE{Yama1996,
|
|
author = {K. Yamada and T. Haraguchi and T. Kajiyama},
|
|
title = {Plasma-graft polymerization of vinyl monomers with reactive groups
|
|
onto a surface of poly (p-phenylene terephthalamide) fiber},
|
|
journal = {J. Appl. Polym. Sci.},
|
|
year = {1996},
|
|
volume = {60},
|
|
pages = {1847\,-\,1853},
|
|
number = {11},
|
|
doi = {10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L},
|
|
file = {:DBD\\Yamada-epoxy-grafting-1996.pdf:PDF},
|
|
publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
|
|
url = {\href{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}}
|
|
}
|
|
|
|
@BOOK{Yasu05,
|
|
title = {Luminous Chemical Vapor Deposition and Interface Engineering},
|
|
publisher = {Marcel Dekker},
|
|
year = {2005},
|
|
editor = {Arthur T. Hubbard},
|
|
author = {Hirotsugu Yasuda},
|
|
volume = {122},
|
|
series = {Surfactant Science Series},
|
|
edition = {1st}
|
|
}
|
|
|
|
@ARTICLE{Yu06,
|
|
author = {L. Yu and others},
|
|
title = {Adhesive bonding with SU-8 at wafer level for microfluidic devices},
|
|
journal = {J. Phys.: Conf. Ser.},
|
|
year = {2006},
|
|
volume = {34},
|
|
pages = {776\,-\,781},
|
|
doi = {10.1088/1742-6596/34/1/128},
|
|
file = {Yu06.pdf:Photolacke\\Yu06.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1088/1742-6596/34/1/128}
|
|
}
|
|
|
|
@ARTICLE{Zhan04,
|
|
author = {J. Zhang and M.B. Chan-Park and S.R. Conner},
|
|
title = {Effect of exposure dose on the replication fidelity and profile of
|
|
very high aspect ratio microchannels in {SU-8}},
|
|
journal = {Lab on a Chip},
|
|
year = {2004},
|
|
volume = {4},
|
|
pages = {646\,-\,653},
|
|
doi = {10.1039/b403304c},
|
|
file = {SU-8-Aspektverhaeltnis-Theorie.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Theorie.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1039/b403304c}
|
|
}
|
|
|
|
@ARTICLE{Zhan1995,
|
|
author = {J. Zhang. and K. Kato and Y. Uyama and Y. Ikada},
|
|
title = {Surface graft polymerization of glycidyl methacrylate onto polyethylene
|
|
and the adhesion with epoxy resin},
|
|
journal = {J. Polymer Sci. Polymer Chem.},
|
|
year = {1995},
|
|
volume = {33},
|
|
pages = {2629\,-\,2638},
|
|
number = {15},
|
|
doi = {10.1002/pola.1995.080331509},
|
|
file = {:DBD\\Zhang-epoxy-grafting-PE-1995.pdf:PDF},
|
|
publisher = {John Wiley \& Sons, Inc. New York},
|
|
url = {http://dx.doi.org/10.1002/pola.1995.080331509}
|
|
}
|
|
|
|
@ARTICLE{Zhao1999,
|
|
author = {Y. Zhao and M.-W. Urban},
|
|
title = {Spectroscopic studies of microwave plasma reactions of maleic anhydride
|
|
on poly (vinylidene fluoride) surfaces: crystallinity and surface
|
|
reactions},
|
|
journal = {Langmuir},
|
|
year = {1999},
|
|
volume = {15},
|
|
pages = {3538\,-\,3544},
|
|
number = {10},
|
|
doi = {10.1021/la981310m},
|
|
file = {:DBD\\Zhao-Carboxy-on-PVDF-1999.pdf:PDF},
|
|
url = {http://dx.doi.org/10.1021/la981310m}
|
|
}
|
|
|
|
@ARTICLE{Zou01,
|
|
author = {X.P. Zou and E.T. Kang and K.G. Neoh and C.Q. Cui and T.B. Lim},
|
|
title = {Surface modification of poly (tetrafluoroethylene) films by plasma
|
|
polymerization of glycidyl methacrylate for adhesion enhancement
|
|
with evaporated copper},
|
|
journal = {Polymer},
|
|
year = {2001},
|
|
volume = {42},
|
|
pages = {6409\,-\,6418},
|
|
number = {15},
|
|
doi = {10.1016/S0032-3861(01)00113-6},
|
|
file = {:DBD\\Zou-epoxy-2001.pdf:PDF},
|
|
publisher = {Elsevier},
|
|
url = {\href{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}}
|
|
}
|
|
|
|
@BOOK{CRC07,
|
|
title = {CRC Handbook of Chemistry and Physics},
|
|
publisher = {Taylor and Francis},
|
|
year = {2007},
|
|
editor = {David R. Lide},
|
|
pages = {12-114},
|
|
edition = {87th},
|
|
file = {:DBD\\CRC-Work functions-2007.pdf:PDF},
|
|
url = {http:/www.hbcpnetbase.com}
|
|
}
|
|
|
|
@STANDARD{ASTME1294,
|
|
title = {{ASTM}~E~1294-89~(1999), Standard Test Method for Pore Size Characteristics
|
|
of Membrane Filters Using Automated Liquid Porosimeter},
|
|
organization = {ASTM International},
|
|
url = {http://www.astm.org/DATABASE.CART/WITHDRAWN/E1294.htm}
|
|
}
|
|
|
|
@STANDARD{ISO10780,
|
|
title = {{ISO}~10780:1994, Stationary source emissions -- Measurement of velocity
|
|
and volume flowrate of gas streams in ducts},
|
|
organization = {ISO},
|
|
url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=18855}
|
|
}
|
|
|
|
@STANDARD{ISO4003,
|
|
title = {{ISO}~4003:1977, Permeable sintered metal materials -- Determination
|
|
of bubble test pore size},
|
|
organization = {ISO},
|
|
url = {\newline http://www.iso.org/iso/catalogue\_detail.htm?csnumber=9678}
|
|
}
|
|
|
|
@STANDARD{ISO4287,
|
|
title = {{ISO}~4287~(1997), Geometrical Product Specifications Surface Texture
|
|
Profile Method Terms, Definitions and Surface Texture Parameters},
|
|
organization = {ISO},
|
|
url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=10132}
|
|
}
|
|
|