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@ARTICLE{Abgr07,
author = {P. Abgrall and A.-M. Gué},
title = {Lab-on-chip technologies: making a microfluidic network and coupling
it into a complete microsystem---a review},
journal = {J. Micromech. Microeng.},
year = {2007},
volume = {17},
pages = {R15\,-\,R49},
doi = {10.1088/0960-1317/17/5/R01},
file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF},
url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01}
}
@ARTICLE{Abgr06,
author = {P. Abgrall and others},
title = {A novel fabrication method of flexible and monolithic {3D microfluidic
structures using lamination of SU-8} films},
journal = {J. Micromech. Microeng.},
year = {2006},
volume = {16},
pages = {113\,-\,121},
doi = {10.1088/0960-1317/16/1/016},
file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF},
url = {http://dx.doi.org/10.1088/0960-1317/16/1/016}
}
@ARTICLE{Abol05,
author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana},
title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure:
Edge Effect},
journal = {IEEE Trans. Plasma Sci.},
year = {2005},
volume = {33},
pages = {941\,-\,948},
doi = {10.1109/TPS.2005.845093},
file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
review = {Priorität 1
Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
url = {http://dx.doi.org/10.1109/TPS.2005.845093}
}
@ARTICLE{Akis03,
author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik
and A.E. Monich and N.I. Trushkin},
title = {Comparison of the AC Barrier Corona with DC Positive and Negative
Coronas and Barrier Discharge},
journal = {Plasma Physics Reports},
year = {2003},
volume = {29},
pages = {90\,-\,100},
doi = {10.1134/1.1538505},
file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF},
url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf}
}
@ARTICLE{Baba01,
author = {S.E. Babayan and others},
title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure
plasma jet},
journal = {Plasma Sources Sci. Technol.},
year = {2001},
volume = {10},
pages = {573\,-\,578},
number = {4},
doi = {10.1088/0963-0252/10/4/305},
file = {:DBD\\Babayan-SiOx-2001.pdf:PDF},
publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
c1991-},
url = {http://dx.doi.org/10.1088/0963-0252/10/4/305}
}
@ARTICLE{Beck06,
author = {K.H. Becker and K.H. Schoenbach and J.G. Eden},
title = {Microplasmas and applications},
journal = {J. Phys. D: Appl. Phys.},
year = {2006},
volume = {39},
pages = {R55\,-\,R70},
doi = {10.1088/0022-3727/39/3/R01},
file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF},
url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01}
}
@ARTICLE{Bile04,
author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen},
title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with
integrated optics},
journal = {J. Micromech. Microeng.},
year = {2004},
volume = {14},
pages = {814\,-\,818},
doi = {10.1088/0960-1317/14/6/008},
file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF},
url = {http://dx.doi.org/10.1088/0960-1317/14/6/008}
}
@ARTICLE{Blan04,
author = {F. J. Blanco and others},
title = {Novel three-dimensional embedded {SU-8} microchannels fabricated
using a low temperature full wafer adhesive bonding},
journal = {J. Micromech. Microeng.},
year = {2004},
volume = {14},
pages = {1047\,-\,1056},
doi = {10.1088/0960-1317/14/7/027},
file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF},
url = {http://dx.doi.org/10.1088/0960-1317/14/7/027}
}
@ARTICLE{Boga02,
author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen},
title = {Gas discharge plasmas and their applications},
journal = {Spectrochim. Acta. B Atom. Spectros.},
year = {2002},
volume = {57},
pages = {609--658},
number = {4},
doi = {10.1016/S0584-8547(01)00406-2},
file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF},
publisher = {Elsevier},
url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}}
}
@BOOK{Bohl1989,
title = {Technische Strömungslehre},
publisher = {Vogel-Verlag, Würzburg},
year = {1989},
author = {Willi Bohl},
edition = {8th},
url = {http://www.worldcat.org/oclc/315749265}
}
@ARTICLE{Bran07,
author = {R. Brandenburg and others},
title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric
Pressure {Rf}-Driven Plasma Jet},
journal = {Contrib. Plasma Phys.},
year = {2007},
volume = {47},
pages = {72\,-\,79},
doi = {10.1002/ctpp.200710011},
file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF},
url = {http://dx.doi.org/10.1002/ctpp.200710011}
}
@ARTICLE{Bran05,
author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov},
title = {Axial and radial development of microdischarges of barrier discharges
in {N2/O2} mixtures at atmospheric pressure},
journal = {J. Phys. D: Appl. Phys.},
year = {2005},
volume = {38},
pages = {1649\,-\,1657},
number = {11},
doi = {10.1088/0022-3727/38/11/003},
file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF},
publisher = {London: The Institute of Physics and The Physical Society.},
url = {http://dx.doi.org/10.1088/0022-3727/38/11/003}
}
@CONFERENCE{Brea09,
author = {M.C. Breadmore and E. Candish and R.M. Guijt},
title = {Dry film photoresist, saving time and money without compromising
on performance},
booktitle = {\textmu TAS 2009},
year = {2009}
}
@BOOK{Bruu08,
title = {Theoretical Microfluidics},
publisher = {Oxford University Press},
year = {2008},
author = {Henrik Bruus},
url = {http://www.worldcat.org/oclc/176807166}
}
@ARTICLE{Bull01,
author = {N.A. Bullett and others},
title = {Direct imaging of plasma-polymerized chemical micropatterns},
journal = {Surf. Interface Anal.},
year = {2001},
volume = {31},
pages = {1074\,-\,1076},
number = {11},
doi = {10.1002/sia.1146},
file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF},
url = {http://dx.doi.org/10.1002/sia.1146}
}
@ARTICLE{Carl04,
author = {J. Carlier and others},
title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry
analysis},
journal = {J. Micromech. Microeng.},
year = {2004},
volume = {14},
pages = {619\,-\,624},
doi = {10.1088/0960-1317/14/4/024},
file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF},
url = {http://dx.doi.org/10.1088/0960-1317/14/4/024}
}
@ARTICLE{Carl1977,
author = {Carlsson, DJ and Garton, A. and Wiles, DM},
title = {The weatherability of polypropylene monofilaments. Effects of fiber
production conditions},
journal = {Journal of Applied Polymer Science},
year = {1977},
volume = {21},
pages = {2963\,-\,2978},
number = {11},
doi = {10.1002/app.1977.070211112},
file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF},
publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
url = {http://dx.doi.org/10.1002/app.1977.070211112}
}
@ARTICLE{Carr1903,
author = {W.R. Carr},
title = {On the Laws Governing Electric Discharges in Gases at Low Pressures},
journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.},
year = {1903},
volume = {201},
pages = {403-433},
doi = {10.1098/rsta.1903.0020},
file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF},
url = {http://dx.doi.org/10.1098/rsta.1903.0020}
}
@ARTICLE{Chang00,
author = {H.-K. Chang and Y.-K. Kim},
title = {{UV-LIGA process for high aspect ratio structure using stress barrier
and C-shaped etch hole}},
journal = {Sensors and Actuators A},
year = {2000},
volume = {84},
pages = {342\,-\,350},
doi = {10.1016/S0924-4247(00)00408-8},
file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF},
url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}}
}
@ARTICLE{Char1967,
author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson},
title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I.
Theory},
journal = {J. Appl. Phys.},
year = {1967},
volume = {38},
pages = {627\,-\,633},
doi = {10.1063/1.1709385},
file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF},
publisher = {AIP},
url = {http://dx.doi.org/10.1063/1.1709385}
}
@ARTICLE{Char1967-2,
author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson},
title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II.
Experimental},
journal = {J. Appl. Phys.},
year = {1967},
volume = {38},
pages = {634\,-\,640},
doi = {10.1063/1.1709386},
file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF},
publisher = {AIP},
url = {http://dx.doi.org/10.1063/1.1709386}
}
@ARTICLE{Coog1996,
author = {J.J. Coogan and A.D. Sappey},
title = {Distribution of {OH} within silent discharge plasma reactors},
journal = {IEEE Trans. Plasma Sci.},
year = {1996},
volume = {24},
pages = {91\,-\,92},
number = {1},
doi = {10.1109/27.491706},
file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF},
url = {http://dx.doi.org/10.1109/27.491706}
}
@ARTICLE{Cutl1993,
author = {P. Cutler},
title = {Theory of electron emission in high fields from atomically sharp
emitters: Validity of the Fowler-Nordheim equation},
journal = {Progress in Surface Science},
year = {1993},
volume = {42},
pages = {169\,-\,185},
number = {1-4},
doi = {10.1016/0079-6816(93)90068-7},
file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF},
url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}}
}
@BOOK{Davi1998,
title = {Metals handbook: desk edition},
publisher = {ASM International},
year = {1998},
author = {J.R. Davis},
pages = {1128},
edition = {2nd}
}
@ARTICLE{Dikm04,
author = {A.J. Dikmans and others},
title = {A new compact disc format of high density array synthesis applied
to peptide nucleic acids and in situ {MALDI} analysis},
journal = {Molecular diversity},
year = {2004},
volume = {8},
pages = {197\,-\,207},
number = {3},
doi = {10.1023/B:MODI.0000036234.66238.4e},
file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF},
url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e}
}
@PHDTHESIS{Dora02,
author = {Rajesh Dorai},
title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces},
school = {University of Illinois at Urbana-Champaign},
year = {2002},
file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF},
url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf}
}
@ARTICLE{Dora03,
author = {R. Dorai and M.J. Kushner},
title = {A model for plasma modification of polypropylene using atmospheric
pressure discharges},
journal = {J. Phys. D: Appl. Phys},
year = {2003},
volume = {36},
pages = {666\,-\,685},
number = {6},
doi = {10.1088/0022-3727/36/6/309},
file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF},
publisher = {IOP PUBLISHING LTD},
url = {http://dx.doi.org/10.1088/0022-3727/36/6/309}
}
@ARTICLE{Dush1923,
author = {S. Dushman},
title = {Electron Emission from Metals as a Function of Temperature},
journal = {Physical Review},
year = {1923},
volume = {21},
pages = {623\,-\,636},
doi = {10.1103/PhysRev.21.623},
file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF},
publisher = {APS},
url = {http://dx.doi.org/10.1103/PhysRev.21.623}
}
@ARTICLE{Eden03,
author = {J.G. Eden and others},
title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer
structures: arrays, emitters and photodetectors},
journal = {J. Phys. D: Appl. Phys.},
year = {2003},
volume = {36},
pages = {2869\,-\,2877},
doi = {10.1088/0022-3727/36/23/001},
file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF},
url = {http://dx.doi.org/10.1088/0022-3727/36/23/001}
}
@CONFERENCE{Eich05,
author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
bei niedrigen Temperaturen}},
booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
Berlin: VDE-Verlag, 2005, pp. 115-118},
year = {2005},
file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF},
url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926}
}
@ARTICLE{Elia1991,
author = {B. Eliasson and U. Kogelschatz},
title = {Modeling and applications of silent discharge plasmas},
journal = {IEEE Trans. Plasma Sci.},
year = {1991},
volume = {19},
pages = {309\,-\,323},
number = {2},
doi = {10.1109/27.106829},
file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF},
url = {http://dx.doi.org/10.1109/27.106829}
}
@ARTICLE{Klei03,
author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
Swollen Polymer Networks.},
journal = {Macromol. Chem. Phys.},
year = {2003},
volume = {204},
pages = {F24\,-\,F25}
}
@INPROCEEDINGS{Fahl01,
author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
title = {Deposition of multilayer optical coatings onto plastic webs by pulse
magnetron sputtering; challenges and opportunities},
booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
Processes (ISSP), p. 189, Kanazawa, Japan},
year = {2001},
file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF}
}
@CONFERENCE{Flac02,
author = {W.W. Flack and H.A. Nguyen and E. Capsuto},
title = {Characterization of a novel photoresist redistribution material for
advanced packaging applications},
booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference
Series},
year = {2002},
volume = {4690},
pages = {1203\,-\,1216},
doi = {10.1117/12.474198},
file = {:Photolacke\\SINR-resist-2002.pdf:PDF},
url = {http://dx.doi.org/10.1117/12.474198}
}
@ARTICLE{Forb1999,
author = {R.G. Forbes},
title = {Refining the application of Fowler-Nordheim theory},
journal = {Ultramicroscopy},
year = {1999},
volume = {79},
pages = {11\,-\,23},
doi = {10.1016/S0304-3991(99)00097-2},
file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF},
url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2}
}
@ARTICLE{Fowl1928,
author = {R.H. Fowler and L. Nordheim},
title = {Electron Emission in Intense Electric Fields},
journal = {Proceedings of the Royal Society of London. Series A, Containing
Papers of a Mathematical and Physical Character},
year = {1928},
volume = {119},
pages = {173\,-\,181},
number = {781},
month = {May},
file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF},
url = {http://www.jstor.org/pss/95023}
}
@ARTICLE{Gabo1993,
author = {S.R. Gaboury and M.W. Urban},
title = {Microwave plasma reactions of solid monomers with silicone elastomer
surfaces: a spectroscopic study},
journal = {Langmuir},
year = {1993},
volume = {9},
pages = {3225\,-\,3233},
number = {11},
doi = {10.1021/la00035a076},
file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF},
publisher = {American Chemical Society},
url = {http://dx.doi.org/10.1021/la00035a076}
}
@MISC{GEKA,
author = {{GEKA~mbH}},
title = {Destroying chemical warfare agents and contaminated military waste},
howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html
(accessed 06-09-2009)},
owner = {usti},
url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html}
}
@MASTERSTHESIS{Gerb03,
author = {M. Gerbracht},
title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
Trocknungsverfahren}},
school = {Fachhochschule Düsseldorf},
year = {2003},
type = {Diplomarbeit},
file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
}
@INPROCEEDINGS{Golub02-2,
author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke},
title = {Stability of the barrier discharge relative to the filamentation},
booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
Vol. 1, p. 235-236},
year = {2002},
file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF},
url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf}
}
@ARTICLE{Golub03,
author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
title = {Modelling of the homogeneous barrier discharge in helium at atmospheric
pressure},
journal = {J. Phys. D: Appl. Phys.},
year = {2003},
volume = {36},
pages = {39\,-\,49},
doi = {10.1088/0022-3727/36/1/306},
file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
}
@INPROCEEDINGS{Golub01,
author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
title = {The role of emission from the dielectric surface in a homogeneous
barrier discharge in nitrogen},
booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
July 2001) vol VIII p 3239-3244},
year = {2001},
file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf}
}
@MISC{Filament,
author = {Yu. B. Golubovskii},
howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg
(accessed 07-09-2009)},
owner = {usti},
url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg}
}
@INPROCEEDINGS{Golub02,
author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke},
title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen},
booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
Vol. 1, p. 233-234},
year = {2002},
file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
}
@MISC{GolubWeb,
author = {Yu. B. Golubovskii and others},
title = {Homogeneous barrier discharge},
howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html},
url = {http://optics.phys.spbu.ru/~golub/english/barrier.html}
}
@ARTICLE{Goos1998,
author = {A. Goossens and E.L. Maloney and J Schoonman},
title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$},
journal = {Chemical Vapor Deposition},
year = {1998},
volume = {4},
pages = {109\,-\,114},
number = {3},
doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U},
file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF},
publisher = {WILEY-VCH Verlag GmbH Weinheim},
url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}}
}
@ARTICLE{Graz08,
author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. Gruber},
title = {Micropatterned atmospheric pressure discharge surface modification
of fluorinated polymer films for mammalian cell adhesion and protein
binding},
journal = {Appl. Phys. A},
year = {2008},
volume = {92},
pages = {547\,-\,555},
doi = {10.1007/s00339-008-4614-z},
file = {:DBD\\Graz-Patterned surface treatment-2008.pdf:PDF},
url = {http://dx.doi.org/10.1007/s00339-008-4614-z}
}
@ARTICLE{Han04,
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